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Mechanism of nitridation at the melting temperature of silicon

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Journal of Materials Science Letters

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  1. Department of Materials Science, Luleå University of Technology, S-971 87, Luleå, Sweden

    B. Q. Lei

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  1. B. Q. Lei
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Lei, B.Q. Mechanism of nitridation at the melting temperature of silicon. J Mater Sci Lett 15, 670–671 (1996). https://doi.org/10.1007/BF00264108

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  • DOI: https://doi.org/10.1007/BF00264108

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