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Design and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL

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Micro and Nanoelectronics Devices, Circuits and Systems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 904))

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Abstract

An overview on design of MEMS accelerometer involving parallel plate mechanical suspension is analysed. It is built using single-crystal isotropic silicon on the platform ‘COMSOL Multiphysics’. Stepwise analysis is performed to know the effect of structural parameters on Von Mises stress, displacement, eigenfrequency, change in capacitance and also frequency response bringing in the concept of finite element analysis (FEA) by considering g in the range of 0–500 m/s2. All the relations between capacitance and acceleration are interpreted by plotting a graph considering various values, and its application can be well defined in detecting mechanical properties efficiently.

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Acknowledgements

The authors like to thank SVIT, Bangalore and also thank Bhoomika C. S. (Project assistant, CENSE—IISc, Bangalore) for their expert advice and encouragement throughout this project.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Sai Vidya Institute of Technology, Bangalore, VTU, Bangalore, 560064, India

    C. S. Likhith, K. Asha & Narayan Krishnaswamy

Authors
  1. C. S. Likhith
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  2. K. Asha
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  3. Narayan Krishnaswamy
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Corresponding authors

Correspondence to C. S. Likhith or K. Asha .

Editor information

Editors and Affiliations

  1. Electronics and Communication Engineering, National Institute Of Technology Silchar, Silchar, India

    Trupti Ranjan Lenka

  2. Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, USA

    Durgamadhab Misra

  3. Electronic Materials Engineering, Australian National University, Canberra, ACT, Australia

    Lan Fu

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© 2023 The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

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Likhith, C.S., Asha, K., Krishnaswamy, N. (2023). Design and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL. In: Lenka, T.R., Misra, D., Fu, L. (eds) Micro and Nanoelectronics Devices, Circuits and Systems. Lecture Notes in Electrical Engineering, vol 904. Springer, Singapore. https://doi.org/10.1007/978-981-19-2308-1_40

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  • DOI: https://doi.org/10.1007/978-981-19-2308-1_40

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-19-2307-4

  • Online ISBN: 978-981-19-2308-1

  • eBook Packages: EngineeringEngineering (R0)

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