Abstract
In this work, porous Si-SiO2 UV microcavities were obtained by applying two stages of dry oxidation and different oxygen flows. In this way, we observed a maximum wavelength shift (134 nm) of the localized mode microcavity to higher energy when a low oxygen flow was used to obtain porous silicon microcavities. It also depicted a wavelength shift of 121 nm when a maximum oxygen flow was applied. We used an effective medium model to predict the refractive index for two media (silicon and air) and three media (silicon, silicon dioxide, and air) components. The result showed that UV microcavities obtained with higher oxygen flow absorb more UV light. Thus, there was less SiO2 formation, and consequently the optical absorption increased. Besides, a decrease of the PBG bandwidth was achieved by incorporating SiO2 within the porous silicon microcavities. This bandwidth decrease happened because there was less contrast between the high refractive index and the low index of porous Si-SiO2 layers.
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References
Joannopoulos, J.D., Johnson, S.G., Winn, J.N., Meade, R.D.: Photonic Crystals. Princeton University Press, Princeton (2011)
Ocier, C.R., Krueger, N.A., Zhou, W., Braun, P.V.: Tunable visibly transparent optics derived from porous silicon. ACS Photonics 4(4), 909–914 (2017)
Kittle, J.D., Gofus, J.S., III., Abel, A.N., Evans, B.D.: Additive combination of spectra reflected from porous silicon and carbon/porous silicon rugate filters to improve vapor selectivity. ACS Omega 5(31), 19820–19826 (2020)
Pérez, K.S., Estevez, J.O., Méndez-Blas, A., Arriaga, J., Palestino, G., Mora-Ramos, M.E.: Tunable resonance transmission modes in hybrid heterostructures based on porous silicon. Nanoscale Res. Lett. 7(1), 1–8 (2012)
Vyunishev, A.M., Pankin, P.S., Svyakhovskiy, S.E., Timofeev, I.V., Vetrov, S.Y.: Quasiperiodic one-dimensional photonic crystals with adjustable multiple photonic bandgaps. Opt. Lett. 42(18), 3602–3605 (2017)
Jimenéz-Vivanco, M.R., García, G., Carrillo, J., Agarwal, V., Díaz-Becerril, T., Doti, R., et al.: Porous Si-SiO 2 based UV microcavities. Sci. Rep. 10(1), 1–21 (2020)
Ghulinyan, M., Oton, C., Bonetti, G., Gaburro, Z., Pavesi, L.: Free-standing porous silicon single and multiple optical cavities. J. Appl. Phys. 93(12), 9724–9729 (2003)
Ghulinyan, M., Gelloz, B., Ohta, T., Pavesi, L., Lockwood, D., Koshida, N.: Stabilized porous silicon optical superlattices with controlled surface passivation. Appl. Phys. Lett 93(6), 061113 (2008)
Estrada-Wiese, D., del Río, J.A.: Refractive index evaluation of porous silicon using Bragg reflectors. Rev. Mex. Física 64(1), 72–81 (2018)
Martín-Palma, R., Ryan, J.V., Pantano, C.: Spectral behavior of the optical constants in the visible∕ near infrared of GeSbSe chalcogenide thin films grown at glancing angle. J. Vac. Sci. Technol. A: Vac. Surf. Films 25(3), 587–591 (2007)
Khardani, M., Bouaïcha, M., Bessaïs, B.: Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment. Phys. Status Solidi C 4(6), 1986–1990 (2007)
Lugo, J., Lopez, H., Chan, S., Fauchet, P.: Porous silicon multilayer structures: a photonic band gap analysis. J. Appl. Phys. 91(8), 4966–4972 (2002)
Jimenéz-Vivanco, M.R., García, G., Carrillo, J., Morales-Morales, F., Coyopol, A., Gracia, M., et al.: Porous Si-SiO2 UV microcavities to modulate the responsivity of a broadband photodetector. Nanomaterials 10(2), 222 (2020)
Rakhimov, R., Osipov, E., Dovzhenko, D., Martynov, I., Chistyakov, A.: Influence of electro-chemical etching parameters on the reflectance spectra of porous silicon rugate filters. J. Phys.: Conf. Ser. (IOP Publishing) 012026 (2016)
Chhasatia, R., Sweetman, M.J., Prieto-Simon, B., Voelcker, N.H.: Performance optimisation of porous silicon rugate filter biosensor for the detection of insulin. Sens. Actuators B: Chem. 273, 1313–1322 (2018)
Jiménez Vivanco, M.D.R., García, G., Doti, R., Faubert, J., Lugo Arce, J.E.: Time-resolved spectroscopy of ethanol evaporation on free-standing porous silicon photonic microcavities. Materials 11(6), 894 (2018)
Rosli, N., Halim, M.M., Chahrour, K.M., Hashim, M.R.: Incorporation of zinc oxide on macroporous silicon enhanced the sensitivity of macroporous silicon MSM photodetector. ECS J. Solid State Sci. Technol. 9(10), 105005 (2020)
Ramadan, R., Manso-Silván, M., Martín-Palma, R.J.: Hybrid porous silicon/silver nanostructures for the development of enhanced photovoltaic devices. J. Mater. Sci. 55(13), 5458–5470 (2020)
Tregulov, V., Litvinov, V., Ermachikhin, A., Maslov, A.: Influence of deep level defects on photoelectrical processes in pn junction solar cells with porous silicon antireflection coating. In: 2020 ELEKTRO, pp. 1–3. IEEE (2020)
Morales, F., García, G., Luna, A., López, R., Rosendo, E., Diaz, T., et al.: UV distributed Bragg reflectors build from porous silicon multilayers. J. Eur. Opt. Soc.-Rapid Publ. 10 (2015)
Gelloz, B., Koshida, N.: Stabilization and operation of porous silicon photonic structures from near-ultraviolet to near-infrared using high-pressure water vapor annealing. Thin Solid Films 518(12), 3276–3279 (2010)
El-Gamal, A., Ibrahim, S.M., Amin, M.: Impact of thermal oxidation on the structural and optical properties of porous silicon microcavity. Nanomater. Nanotechnol. 7 (2017). https://doi.org/10.1177/1847980417735702
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MATLAB Program Code
This code is used to obtain the transmission and reflection spectra of microcavities in the Vis and UV range.
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Jiménez-Vivanco, M.R. et al. (2022). Tuning Wavelength of the Localized Mode Microcavity by Applying Different Oxygen Flows. In: Kaiser, M.S., Ray, K., Bandyopadhyay, A., Jacob, K., Long, K.S. (eds) Proceedings of the Third International Conference on Trends in Computational and Cognitive Engineering. Lecture Notes in Networks and Systems, vol 348. Springer, Singapore. https://doi.org/10.1007/978-981-16-7597-3_37
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