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Microelectrode Array

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT))

Abstract

Microelectrode arrays (MEAs) have been applied as chronical interface with the neural system and play important roles in neural prosthesis for various diseases, including sensory and motion injuries such as blind, deaf, and paralyzed, and also mental diseases like depression, Parkinson’s disease, and epilepsy. Thanks the inherent merits of microfabrication, MEAs show the advantages of low cost, mass production, high density, flexibility (optional), small footprint, integratability with ICs (integrated circuits), etc. In this chapter, we discuss about the general requirements and consideration of materials, design, and fabrication of MEAs in details. Then the various devices and their applications in the central nervous system and the peripheral nervous system are overviewed, respectively.

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Authors and Affiliations

  1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, 030051, Taiyuan, China

    Renxin Wang

  2. Research Institute, China Electronics Technology Group Corporation, 400060, Chongqing, China

    Huaiqiang Yu

  3. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, 5 Yiheyuan Rd, Haidian, 100871, Beijing, China

    Zhihong Li

Authors
  1. Renxin Wang
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  2. Huaiqiang Yu
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  3. Zhihong Li
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Corresponding author

Correspondence to Zhihong Li .

Editor information

Editors and Affiliations

  1. Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, Jiangsu, China

    Qing-An Huang

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Wang, R., Yu, H., Li, Z. (2018). Microelectrode Array. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-10-5945-2_41

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