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High-Performance Acoustic Devices for Wireless Communication and Sensor Applications

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT))

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Abstract

Surface acoustic wave (SAW) resonators and film bulk acoustic resonators (FBAR) are two of the most important passive resonators. After several decades of research and development, they are widely applied for wireless communications such as filters and duplexers, and broad sensing applications like pressure sensors, temperature sensors, gas sensors, biosensors, photoelectric sensors, and many others. In this chapter, we first introduce basic concepts and mainstream topics of SAW and FBAR devices. Then we give a detailed presentation of several methods to fabricate high-performance resonators including using multilayered structures and improved process. Flexible SAW and FBAR devices are also introduced. Several sensing applications are given afterwards. Finally, a summary and outlook is presented regarding the further improvement of device performance and new research fields.

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Author information

Authors and Affiliations

  1. School of Electronic and Information Engineering, South China University of Technology, 100084, Guangzhou, China

    Changjian Zhou

  2. Institute of Microelectronics, Tsinghua University, 100084, Beijing, China

    Xiangguang Tian & Tian-Ling Ren

Authors
  1. Changjian Zhou
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  2. Xiangguang Tian
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  3. Tian-Ling Ren
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Corresponding author

Correspondence to Tian-Ling Ren .

Editor information

Editors and Affiliations

  1. Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, Jiangsu, China

    Qing-An Huang

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© 2018 Springer Nature Singapore Pte Ltd.

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Zhou, C., Tian, X., Ren, TL. (2018). High-Performance Acoustic Devices for Wireless Communication and Sensor Applications. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-10-5945-2_35

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