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A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT))

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Abstract

This chapter presents the fundamental theory, mechanical design, fabrication technique, detecting circuit, and characterization of a novel double differential capacitive torsional accelerometer. The accelerometer consists of a double differential sensing structure with four proof masses hanging on a common V-shaped torsional beam which mainly aims to improve the temperature robustness and long-term performance of the torsional accelerometer. This chapter supplies a new method for the accelerometer performances improvement and this method can also be used in the design of other sensors.

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Author information

Authors and Affiliations

  1. National University of Defense Technology, Changsha, China

    Dingbang Xiao, Xuezhong Wu, Qingsong Li & Zhanqiang Hou

Authors
  1. Dingbang Xiao
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  2. Xuezhong Wu
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  3. Qingsong Li
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  4. Zhanqiang Hou
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Corresponding author

Correspondence to Dingbang Xiao .

Editor information

Editors and Affiliations

  1. Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, Jiangsu, China

    Qing-An Huang

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Xiao, D., Wu, X., Li, Q., Hou, Z. (2018). A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-10-5945-2_17

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