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Nanopatterned Thin Films with Perpendicular Magnetic Anisotropy – Structure and Magnetism

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Abstract

We describe two unconventional kinds of thin films patterning – nanosphere lithography combined with plasma etching and direct laser interference lithography. We used both techniques to create nanostructures in thin films with perpendicular magnetic anisotropy. In the first discussed case we fabricated the holes in magnetic material; in the second we generated the linear structures. We studied the magnetic properties, magnetic reversal, and the evolution of the domain pattern for matrices of Co/Pd antidots. Finally, we applied direct interference lithography to induce the transformation from disordered to ordered phase, which should result in perpendicular magnetic anisotropy of linear structures of FePt alloy and Fe/Pd multilayers.

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Correspondence to Marta Marszalek .

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Krupiński, M., Zabila, Y., Marszalek, M. (2020). Nanopatterned Thin Films with Perpendicular Magnetic Anisotropy – Structure and Magnetism. In: Kaidatzis, A., Sidorenko, S., Vladymyrskyi, I., Niarchos, D. (eds) Modern Magnetic and Spintronic Materials. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-024-2034-0_3

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