Abstract
We describe two unconventional kinds of thin films patterning – nanosphere lithography combined with plasma etching and direct laser interference lithography. We used both techniques to create nanostructures in thin films with perpendicular magnetic anisotropy. In the first discussed case we fabricated the holes in magnetic material; in the second we generated the linear structures. We studied the magnetic properties, magnetic reversal, and the evolution of the domain pattern for matrices of Co/Pd antidots. Finally, we applied direct interference lithography to induce the transformation from disordered to ordered phase, which should result in perpendicular magnetic anisotropy of linear structures of FePt alloy and Fe/Pd multilayers.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Sellmyer D, Skomski R (2006) Advanced magnetic nanostructures. Springer, New York
Heinrich B, Bland JAC (2005) Ultrathin magnetic structures IV applications of nanomagnetism, 1st edn. Springer, Berlin/Heidelberg
Bland JAC, Heinrich B (2005) Ultrathin magnetic structures III fundamentals of nanomagnetism. Springer, Berlin/Heidelberg
Hu B, Amos N, Tian Y et al (2011) J Appl Phys 109:034314
Baltz V, Marty A, Rodmacq B et al (2007) Phys Rev B 75:014406
Ohtake M, Ouchi S, Kirino F (2012) J Appl Phys 111:07A708
Grobis M, Schulze C, Faustini M et al (2011) Appl Phys Lett 98:2011
Rahman MT, Shams NN, Wu YC et al (2007) Appl Phys Lett 91:132505
Swiatkowska-Warkocka Z, Pyatenko A, Krok F et al (2015) Sci Rep 5:9849
Mátéfi-Tempfli S, Mátéfi-Tempfli M, Vlad A et al (2009) J Mater Sci Mater Electron 20:249
Kac M, Zarzycki A, Kac S (2016) Mater Sci Eng B 211:75
Kanchibotla B, Pramanik S, Bandyopadhyay S (2007) In: Lyshevski SE (ed) In Nano and Molecuar electronics handbook. CRC Press, Boca Raton
Escrig J, Daub M, Landeros P et al (2007) Nanotechnology 18:445706
Adeyeye AO, Singh N (2008) J Phys D Appl Phys 41:153001
Iihama S, Khan M, Naganuma H et al (2015) J Magn Society Japan 39:57
Yabuhara O, Ohtake M, Tobari K et al (2011) Thin Solid Films 519:8359
Thiele J, Folks L, Toney MF et al (1998) J Appl Phys 84:5686
Lu Z, Walock MJ, Leclair P et al (2009) J Vac Sci Technol A 27:1067
Barton CW, Thomson T (2016) J Appl Phys 118:063901
Chowdhury P, Kulkarni PD, Krishnan M et al (2012) J Appl Phys 112:023912
den Broeder FJA, Hoving W, Bloemen PJH (1991) J Magn Magn Mater 93:562
Engel BN, England CD, van Leeuwen RA (1991) Phys Rev Lett 67:1910
Shaw JM, Nembach HT, Silva TJ et al (2009) Phys Rev B 80:184419
Barnes JR, O’Shea SJ, Welland ME et al (1994) J Appl Phys 76:2974
Shaw JM, Rippard WH, Russek SE et al (2007) J Appl Phys 101:023909
Nemoto H, Hosoe Y (2005) J Appl Phys 97:10J109
Gottwald M, Lee K, Kan JJ et al (2013) Appl Phys Lett 102:052405
Tadisina ZR, Natarajarathinam A, Clark BD et al (2010) J Appl Phys 107:09C703
Sbiaa R, Ranjbar M, Åkerman J (2015) J Appl Phys 117:17C102
Rozatian ASH, Marrows CH, Hase TPA et al (2005) J Phys Condens Matter 17:3759
Kawaji J, Asahi T, Onoue T et al (2002) J Magn Magn Mater 251:220
Kim S, Lee S, Kim J et al (2011) J Appl Phys 109:109
Onoue T, Asahi T, Kuramochi K et al (2001) J Magn Magn Mater 235:40
Kim SK, Chernov VA, Koo YM (1997) J Magn Magn Mater 170:L7
Kim S, Koo Y, Chernov V (2000) Phys Rev B 62:3025
Kim SK, Shin SC (2001) J Appl Phys 89:3055
Carrey J, Berkowitz AE, Egelhoff WE (2003) Appl Phys Lett 83:5259
Johnson MT, Bloemen PJH, den Broeder FJA (1996) Reports Prog Phys 59:1409
Carcia PF (1998) J Appl Phys 63:5066
Hiroshi T (1993) Jpn J Appl Phys 32:L1328
Hashimoto S, Ochiai Y, Aso K (1989) J Appl Phys 66:4909
Kohlhepp JT, Strijkers GJ, Wieldraaijer H et al (2002) Phys Stat Solidi A 189:701
Pearson WB (1958) A handbook of lattice Spacings and structures of metals and alloys. Pergamon Press, London
Aitchison PR, Chapman JN, Gehanno V et al (2001) J Magn Magn Mat 223:138
Carbucicchio M, Ciprian R, Palombarini G (2010) J Magn Magn Mat 322:1307
Weil DH, Yao YD (2009) Appl Phys Lett 95:172503
Lukaszew RA, Cebollada A, Clavero C (2006) Physica B 384:15
Jeong S, Hsu YN, Laughlin DE et al (2001) IEEE Trans Magne 37:1299
Polit A, Makarov D, Brombacher C et al (2015) J Magn Magn Mat 381:316
Kitakami O, Shimada Y, Oikawa K et al (2001) Appl Phys Lett 78:1104
Albrecht M, Brombacher C (2013) Phys Stat Solidi A 210:1272
Bourgognon C, Tatarenko S, Cibert J et al (2000) App Phys Lett 76:1455
Yang E, Laughlin DE, Zhu JG (2010) IEEE Trans Magn 46:2446
Yang E, Laughlin DE (2008) J Appl Phys 104:023904
Xu YF, Chen JS, Wang JP (2002) Appl Phys Lett 80:3325
Unal AA, Valencia S, Radu F et al (2016) Phys Rev Appl 5:064007
Kruglyak VV, Demokritov SO, Grundler D (2010) J Phys D Appl Phys 43:264001
Krawczyk M, Grundler D (2014) J Phys: Cond Mat 26:123202
Krupinski M, Mitin D, Zarzycki A et al (2017) Nanotechnology 28:085302
Krupinski M, Sobieszczyk P, Zieliński P et al (2019) Sci Rep 9:13276
Fischer UC, Zingsheim HP (1981) J Vac Sci Technol 19:881
Deckman HW, Dunsmuir JH (1982) Appl Phys Lett 41:377
Haynes CL, van Duyne RP (2001) J Phys Chem B 105:5599
Zhang X, Whitney AV, Zhao J et al (2006) J Nanosci Nanotech 6:1920
Zhao X, Wen J, Li L et al (2019) J Appl Phys 126:141101
Ai B, Yu Y, Möhwald H et al (2014) Adv Coll Interf Sci 206:5
Wang H, Levin CS, Halas NJ (2005) J Am Chem Soc 127:14992
Ji D, Li T, Fuchs H (2017) Adv Electron Mater 3:1600348
Akinoglu EM, Morfa AJ, Giersig M (2014) Langmuir 30:12354
Hauet T, Hellwig O, Park SH et al (2011) Appl Phys Lett 98:172506
Hu G, Thomson T, Rettner CT et al (2005) J Appl Phys 97:10J702
Lau JW, McMichael RD, Chung SH et al (2008) Appl Phys Lett 92:012506
Sbiaa R, Bilin Z, Ranjbar M et al (2010) J Appl Phys 107:103901
Mitin D, Grobis M, Albrecht M (2016) Rev Sci Instrum 87:023703
Lee J, Brombacher C, Fidler J et al (2011) Appl Phys Lett 99:062505
Grafe J, Weigand M, Trager N et al (2016) Phys Rev B 93:104421
Kim DY, Tripathy SK, Ki L et al (1995) Appl Phys Lett 66:1166
Heintze M, Santos PV, Nebel CE et al (1994) Appl Phys Lett 64:3148
Phillips HM, Callahan DL, Sauerbrey R et al (1991) Appl Phys Lett 58:2761
Ilcisin KJ, Fedosejev R (1987) Appl Opt 26:396
Kelly MK, Rogg J, Nebel CE (1998) Phys Stat Sol A 166:651
Nebel CE, Christiansen S, Strunk HP (1998) Phys Stat Sol A 166:667
Fukumura H, Ujii H, Banjo H et al (1998) Appl Surf Sci 127:761
Fukumura H, Kohji Y, Nagasawa K et al (1994) J Am Chem Soc 116:10304
Shoji S, Kawata S (2000) Appl Phys Lett 76:2668
Lorens M, Zabila Y, Krupinski M et al (2012) Acta Physica Pol A 121:543
Lasagni A, Mücklich F (2005) Appl Surf Sci 240:214
Mücklich F, Lasagni A, Daniel C (2005) Intermetallics 13:437
Lasagni A, Holzapfel C, Weirich T et al (2007) Appl Surf Sci 253:8070
Daniel C, Mücklich F (2005) Appl Surf Sci 242:140
Daniel C, Mücklich F, Liu Z (2003) Appl Surf Sci 208:317
Zabila Y, Perzanowski M, Dobrowolska A et al (2009) Acta Physica Pol A 115:591
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature B.V.
About this paper
Cite this paper
Krupiński, M., Zabila, Y., Marszalek, M. (2020). Nanopatterned Thin Films with Perpendicular Magnetic Anisotropy – Structure and Magnetism. In: Kaidatzis, A., Sidorenko, S., Vladymyrskyi, I., Niarchos, D. (eds) Modern Magnetic and Spintronic Materials. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-024-2034-0_3
Download citation
DOI: https://doi.org/10.1007/978-94-024-2034-0_3
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-024-2033-3
Online ISBN: 978-94-024-2034-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)