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Deposition Behavior of Charged Nanoparticles

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Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 60))

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Abstract

From Chaps. 6–10, it can be said that the gas phase generation of CNPs and their deposition into films and nanostructures are quite general in the CVD and some PVD processes.

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Authors and Affiliations

  1. Material Science and Engineering, Seoul National University, Seoul, Korea (Republic of)

    Nong Moon Hwang

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  1. Nong Moon Hwang
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Correspondence to Nong Moon Hwang .

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Hwang, N. (2016). Deposition Behavior of Charged Nanoparticles. In: Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes. Springer Series in Surface Sciences, vol 60. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-7616-5_11

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