Abstract
We describe spectromicroscopy experiments at the X1A facility at the National Synchrotron Light Source. In these efforts, two scanning x-ray microscopes based on zone plate optics are utilized. One of these is an ultrahigh vacuum scanning photoemission microscope (SPEM) solely intended for surface characterization, while the other is a scanning transmission x-ray microscope (STXM). The former was substantially modified during the last few years and recently completed the first tests. We will describe its performance and outline further improvements. STXM has been utilized to provide chemical contrast via absorption spectroscopy in studies of a variety of polymeric materials in transmission. A spatial resolution of 30-40 ran and an energy resolution of 400 meV could be achieved in these experiments.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
For a somewhat dated overview that however nevertheless lists most of the spectromicroscopy efforts presently under way, see Ade, H.W., (1992) Scanning photoemission microscopy with synchrotron radiation, Nucl. Instr. Meths. in Phys. Res. A. 319, 311. Also see reference [5] and articles and references therein for some of the newer developments.
Tonner, B.P., Harp, G.R., Koranda, S.F., and Zhang, J., (1992) An electrostatic microscope for synchrotron radiation X-ray absorption microspectroscopy, Rev. Sci. Instr. 63, 564.
Kunz, C. and Voss, J., (1995) Scientific progress and improvement of optics in the VUV range, Rev. Sci. Instrum. 66, 2021.
Ng, W., Ray-Chaudhuri, A.K., Liang, S., Singh, S., Solak, H., Welnak, J., Cerrina, F., Margaritondo, G., Underwood, J.H., Kortright, J.B., and Perera, R.CC, (1994) High Resolution Spectromicroscopy with MAXIMUM: Photoemission Reaches the 1000 A Scale, Nucl. lustrum. Meth. A347, 422.
Rossei, R., (1995) Chemical, Structural and Electronic Analysis of Heterogenous Sufaces on Nanometer Scale, Klewer Academic Puplishers, Dordrecht. These proceedings.0
Jacobsen, C, Williams, S., Anderson, E., Brown, M.T., Buckley, C.J., Kern, D., Kirz, J., Rivers, M., and Zhang, X., (1991) Diffraction-limited imaging in a scanning transmission X-ray microscope, Opt. Commun. 86,351.
Rarback, H., Buckley, C, Ade, H., et al, (1990) Coherent radiation for X-ray imaging-the soft X-ray Undulator and the Xla Beamline at the NSLS, J. X-ray Sci. Technol. 2, 273.
Kirz, J., Ade, H., Howells, M., Jacobsen, C, Ko, K.-H., Lindaas, S., McNulty, L, Sayre, D., Williams, S., and Zhang, X., (1992) Soft X-ray microscopy with coherent X rays, Rev. Sci. Instrum. 63
Ade, H., Kirz, J., Hulbert, S., Johnson, E., Anderson, E., and Kern, D.,(1990) X-ray spectromicroscopy with a zone plate generated microprobe, Appl. Phys. Lett. 56, 1841–1843.
Ade, H., Kirz, J., Hulbert, S., Johnson, E., Anderson, E., and Kern, D.,(1991) Images of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source, J. Vac. Sci. Technol. 9,1902.
Ade, H., Ko, C.H., and Anderson, E., (1992) Astigmatism correction in X-ray scanning photoemission microscope with use of elliptical zone plate, Appl. Phys. Lett. 60, 1040.
Ade, H., (1990) Development of a scanning photoemission microscope, Ph. D thesis, SUNY@Stony Brook, Stony Brook.
Ade, H., Ko, C.-H., Johnson, E.D., and Anderson, E., (1992) Improved Images with the Scanning Photoelectron Microscope at the National Synchrotron Light Source, Surface and Interface Analysis. 19,17.
Ko, C.-H., Kirz, J., Maier, K., Winn, B., Ade, H., Hulbert, S., Johnson, E., and Anderson, E., (1995) Chemical State Mapping of Material Surfaces with the X1A Second Generation Scanning Photoemission Microscope (X1A SPEM-II), in W. Yun (eds.), X-ray Microbeam Technology and Applications, Proc. SPIE Vol 2516.
Ko, C.-H., Kirz, J., Ade, H., Johnson, E., Hulbert, S., and Anderson, E., (1995) Applications of the scanning photoemission microscope for element identification on material surfaces, Mat. Res. Soc. Proc. Vol. 375, 303.
Ade, H., Zhang, X., Cameron, S., Costello, C, Kirz, J., and Williams, S.,(1992) Chemical contrast in X-ray microscopy and spatially resolved XANES spectroscopy of organic specimens, Science 258,972.
Ade, H. and Hsiao, B., (1993) X-ray Linear Dichroism Microscopy, Science 262,1427.
Ade, H., Smith, A., Cameron, S., Cieslinski, R., Costello, C, Hsiao, B., Mitchell, G., and Rightor, E., (1995) X-Ray microscopy in polymer science: Prospects of a “ new” imaging technique, Polymer 36,1843–1848.
Zhang, X., Balhorn, R., Jacobsen, C, Kirz, J., and Williams, S., (1994) Mapping DNA and Protein in biological samples using the scanning transmission x-ray microscope, in G.W. Bailey and A.J. Garratt-Reed (eds.), Proc. 52nd Annual Meeting of Microscopy Society of America, San Francisco Press, Inc., San Francisco, 50–51. Also, Zhang, X., Balhorn, R., Mazrimas, J., and Kirz, J. (1995) Mapping and measuring DNA to protein ratios in mammalian sperm head by XANES imaging, Journal of Structural Biology, (submitted).
Botto, R.E., Cody, G.D., Kirz, J., Ade, H., Behal, S., and Disko, M., (1994) Selective Chemical Mapping of Coal Microheterogeneity by Scanning Transmission X-ray Microscopy, Energy & Fuels 8,151–154.
Cody, G.D., Botto, R.E., Ade, H., Behal, S., Disko, M., and Wirick, S., (1995) C-NEXAFS Microanalysis and Scanning X-ray Microscopy of Microheterogeneitie in a High Volatile A Bituminous Coal, Energy & Fuels 9, 153. Also, Cody, G.D., Botto, R.E., Ade, H., Behal, S., Disko, M., and Wirick, S., (1995) Inner shell spectroscopy and imaging of a sub bituminous coal: in situ analysis of organic and inorganic microstructure using C(ls)-, Ca(2p), and Cl(2s) NEXAFS, Energy & Fuels. (accepted for publication)
Ade, H., Smith, A.P., Subramoney, S., and Hsiao, B., (in preparation)
Voss, J., Storjohan, I., Kunz, C, Woewes, A., Pretorius, M., Ranck, A., Sievers, H., Wedemeier, V., Wochnowski, M., and Zhang, H. (1994) Soft X-ray Microscopy at HASYLAB/DESY, in A.I. Erko and V.V. Aristov (eds.), X-ray Microscopy IV, Bogorodski Pechatnik, Chernogolovka, Moscow Region.
Ko, C.-H., (1995) Development of a Second Generation Scanning Photoemission Microscope at the National Synchrotron Light Source, Ph.D. Thesis, SUNY@Stony Brook, Stony Brook.
Smith, A.P., Ade, H., Subramoney, S., and Hsiao, B., (in preparation)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1997 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Ade, H., Ko, CH. (1997). Scanning Spectro-Microscopy with 250 to 800 eV X-Rays. In: Rosei, R. (eds) Chemical, Structural and Electronic Analysis of Heterogeneous Surfaces on Nanometer Scale. NATO ASI Series, vol 333. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5724-7_4
Download citation
DOI: https://doi.org/10.1007/978-94-011-5724-7_4
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6414-9
Online ISBN: 978-94-011-5724-7
eBook Packages: Springer Book Archive