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Adhesion and Friction in MEMS

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Micro/Nanotribology and Its Applications

Part of the book series: NATO ASI Series ((NSSE,volume 330))

Abstract

Characteristic for MEMS structures is the high surface to volume ratio. In combination with the extreme smooth surfaces, this can easily lead to dominant adhesion forces between contacting structures. In the past years, stiction problems have been successfully reduced by avoiding contact between the slender structures and the substrate. In micromotor applications, contact between moving and fixed parts can not be avoided, or even is essential to the functioning of the device. Reduction of adhesion forces, to obtain low enough friction is needed in these devices.

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Author information

Authors and Affiliations

  1. MESA Research Institute, University of Twente, P.O. Box 217, 7500 AE, Enschede, the Netherlands

    Niels Tas, Bart Vogelzang, Miko Elwenspoek & Rob Legtenberg

Authors
  1. Niels Tas
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  2. Bart Vogelzang
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  3. Miko Elwenspoek
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  4. Rob Legtenberg
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Editor information

Editors and Affiliations

  1. Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio, USA

    Bharat Bhushan (Ohio Eminent Scholar Professor, Director) (Ohio Eminent Scholar Professor, Director)

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© 1997 Springer Science+Business Media Dordrecht

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Tas, N., Vogelzang, B., Elwenspoek, M., Legtenberg, R. (1997). Adhesion and Friction in MEMS. In: Bhushan, B. (eds) Micro/Nanotribology and Its Applications. NATO ASI Series, vol 330. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5646-2_43

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  • DOI: https://doi.org/10.1007/978-94-011-5646-2_43

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6381-4

  • Online ISBN: 978-94-011-5646-2

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