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The use of plasma silicon nitrides and hydrogen plasma on polycrystalline silicon solar cells

  • Conference paper
Tenth E.C. Photovoltaic Solar Energy Conference

Abstract

In order to improve the efficiency of polycrystalline silicon solar cells, the surface, the emitter and the bulk of the solar cell need to be passivated. In this paper, the combined action of surface passivation by means of a thin thermal TCA oxide, the use of hydrogen containing plasma silicon nitrides as anti-reflective coating and SiO2-Si interface-, emitter-and bulk passivation by means of a hydrogen plasma are investigated.

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Author information

Authors and Affiliations

  1. Interuniversity Micro-Electronics Center, IMEC, Kapeldreef 75, B-3030, Leuven, Belgium

    J. Coppye, M. Ghannam, P. De Schepper, J. Nijs & R. Mertens

Authors
  1. J. Coppye
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  2. M. Ghannam
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  3. P. De Schepper
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  4. J. Nijs
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  5. R. Mertens
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Editor information

Editors and Affiliations

  1. Universidad Politécnica, Madrid, Spain

    A. Luque  & G. Sala  & 

  2. Commission of the European Communities, Brussels, Belgium

    W. Palz

  3. Secretaria de Estado da Energia, Lisbon, Portugal

    G. Dos Santos

  4. WIP, Munich, F.R. Germany

    P. Helm

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© 1991 Springer Science+Business Media Dordrecht

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Coppye, J., Ghannam, M., De Schepper, P., Nijs, J., Mertens, R. (1991). The use of plasma silicon nitrides and hydrogen plasma on polycrystalline silicon solar cells. In: Luque, A., Sala, G., Palz, W., Dos Santos, G., Helm, P. (eds) Tenth E.C. Photovoltaic Solar Energy Conference. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-3622-8_162

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  • DOI: https://doi.org/10.1007/978-94-011-3622-8_162

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-5607-6

  • Online ISBN: 978-94-011-3622-8

  • eBook Packages: Springer Book Archive

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