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Semiconductor Gas Sensors Based on SnO2 Thick Films

  • Chapter
Gas Sensors

Abstract

Some physical and chemical aspects about the behaviour of semiconductor gas sensors are discussed. Discussion is restricted to sintered SnO2 which is usually in the form of a thick film. Since we have concentrated on electrical studies of the response characteristics of SnO2 thick films in our laboratory, the discussion also has an emphasis on the transducing properties (conductance signals) of the sensor. Initially, some electrical properties of SnO2 are reviewed. Subsequently a description of the general form of conductance in sintered samples is presented. From the chemical point of view, the central role of the oxygen ions, O<Stack><Subscript>2</Subscript><Superscript>−</Superscript></Stack> and O−, on the SnO2 surface is analysed in connection with the conductance response at a constant temperature and after quick temperature changes. The role of the adsorption/desorption mechanism is emphasized. Some discussion about the surface defect mechanism is also included. The use of catalysts and promoters to improve sensor properties, together with some peculiar effects related to electrode materials are also discussed.

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  1. Microelectronics Laboratory, University of Oulu, SF-90570, Oulu, Finland

    Vilho Lantto

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  1. Thin Film Laboratory, University of Brescia, Italy

    G. Sberveglieri

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Lantto, V. (1992). Semiconductor Gas Sensors Based on SnO2 Thick Films. In: Sberveglieri, G. (eds) Gas Sensors. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-2737-0_4

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  • DOI: https://doi.org/10.1007/978-94-011-2737-0_4

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