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Ion Milling of Polycrystalline Diamond Films

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Wide Band Gap Electronic Materials

Part of the book series: NATO ASI Series ((ASHT,volume 1))

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Abstract

One of the methods of the diamond processing is the ion milling. By ion bombardment one can obtain the elements of surface topography of micron and submicron dimensions, the sharp edges of the grooves having absolutely vertical walls and optically smooth surfaces formed on the removal of a diamond layer.

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References

  1. Semenov AP. (1993) Prib. i Tech. Eksp. N5, pp.128–133.

    Google Scholar 

  2. Semenov A.P., Batuiev B.-Sh.Ch. (1991) Prib. i Tech. Eksp. N1 pp.177–179.

    Google Scholar 

  3. Alexenko A.E., Belyanin A.F., Bouilov L.L., Semenov A.P., Spitsyn B.V. (1991) in: Materialy 2 Konf. “Tonkiye Plyonki v Elektronike”, Moskva, Izhevsk, pp.74–79.

    Google Scholar 

  4. Semenov A.P., Smirnyagina N.N., Belyanin A.F., Alexenko A.E., Bouilov L.L., Spitsyn B.V. (1992) in: Materialy 3 Konf.“Tonkiye Plyonki v Electronike”, Moskva, Yoshkar-Ola, 2, pp.154–155.

    Google Scholar 

  5. Belyanin A.F., Semenov A.P., Alexenko A.E., Bouilov L.L., Spitsyn B.V. (1993) in: Materialy 4 Konf. “Tonkiye Plyonki v Electronike”, Moskva, Ulan-Ude, pp.166–168.

    Google Scholar 

  6. Semenov A.P., Belyanin A.F., Alexenko A.E., Bouilov L.L., Spitsyn B.V. (1991) in: Almazniye Plyonki (1 Internat. Seminar, Ulan-Ude, Baikalskiye Volny) Moskva, Ulan-Ude, p.39.

    Google Scholar 

  7. Bouilov L.L., Alexenko A,E.,Botev A.A.,Spitsyn B.V.(1986) Dokl. AN SSSR, vol.287, N4, pp.888–891.

    Google Scholar 

  8. Spitsyn B.V., Belyanin A.F., Bulyonkov N.A., Rivilis V.M. (1987) in: Sb. Technika Sredstv Svyazi, Ser.TPO, Vyp.1, pp.61–70.

    Google Scholar 

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Author information

Authors and Affiliations

  1. Institute of Physical Chemistry of the Russian Academy of Sciences, Russia, 117915, Moscow, Leninskiy pr., 31

    A. E. Alexenko, L. L. Bouilov & B. V. Spitsyn

  2. Central Research Technological Institute, Russia, 121355, Moscow, Ivan Franko str., 4

    A. F. Belyanin

  3. Buryat Institute of Natural Sciences of the Siberian Division of the Russian Academy of Sciences, Russia, 670042, Sakhjanova str., 6, Ulan-Ude

    A. P. Semenov

Authors
  1. A. E. Alexenko
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  2. A. F. Belyanin
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  3. L. L. Bouilov
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  4. A. P. Semenov
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  5. B. V. Spitsyn
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Editor information

Editors and Affiliations

  1. University of Missouri-Columbia, Columbia, Missouri, USA

    Mark A. Prelas  & Tina Stacy  & 

  2. Florida A&M University/Florida State University, Tallahassee, Florida, USA

    Peter Gielisse

  3. Rockford Diamond Technology, Inc., Columbia, Missouri, USA

    Galina Popovici

  4. Russian Academy of Sciences, Moscow, Russia

    Boris V. Spitsyn

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© 1995 Springer Science+Business Media Dordrecht

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Alexenko, A.E., Belyanin, A.F., Bouilov, L.L., Semenov, A.P., Spitsyn, B.V. (1995). Ion Milling of Polycrystalline Diamond Films. In: Prelas, M.A., Gielisse, P., Popovici, G., Spitsyn, B.V., Stacy, T. (eds) Wide Band Gap Electronic Materials. NATO ASI Series, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0173-8_22

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  • DOI: https://doi.org/10.1007/978-94-011-0173-8_22

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4078-5

  • Online ISBN: 978-94-011-0173-8

  • eBook Packages: Springer Book Archive

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