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Precise and Feasible Fabrication Process of Microfluidic Devices on a Borosilicate Glass Chip

  • Conference paper
Micro Total Analysis Systems 2002

Abstract

In order to establish the feasible and reliable fabrication process of high-precision microfluidic devices on borosilicate glass (Corning #7740) substrates, deep dry etching technology of borosilicate glass using high density plasmas and the rapid bonding method of glass plates using modified anodic bonding have been studied.

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References

  1. T. Ujiie, T. Kikuchi, T. Ichiki and Y. Horiike, Jpn. J. Appl. Phys. 39, 3677–3682 (2000)

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  2. X. Li, T. Abe and M. Esashi, Proc. of Micro Electro Mechanical Systems 2000, Miyazaki, Japan (2000) p 271.

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  3. T. Ichiki, Y. Sugiyama and Y Horiike, Proc. 23rd Int. Symp. on Dry Process, Tokyo, Japan (2001) pp. 63–68.

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Author information

Authors and Affiliations

  1. Bio-Nano Electronics Research Center, Toyo University, Japan

    Y. Sugiyama, Y. Otsu & T. Ichiki

  2. Department of Materials Science, School of Engineering, The University of Tokyo, Japan

    Y. Horiike

Authors
  1. Y. Sugiyama
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  2. Y. Otsu
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  3. T. Ichiki
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  4. Y. Horiike
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Editor information

Editors and Affiliations

  1. The University of Tokushima, Tokushima, Japan

    Yoshinobu Baba

  2. Waseda University, Tokyo, Japan

    Shuichi Shoji

  3. University of Twente, Enschede, The Netherlands

    Albert van den Berg

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© 2002 Springer Science+Business Media Dordrecht

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Sugiyama, Y., Otsu, Y., Ichiki, T., Horiike, Y. (2002). Precise and Feasible Fabrication Process of Microfluidic Devices on a Borosilicate Glass Chip. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_39

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  • DOI: https://doi.org/10.1007/978-94-010-0295-0_39

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-3952-9

  • Online ISBN: 978-94-010-0295-0

  • eBook Packages: Springer Book Archive

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