Abstract
CVD fluorocarbon (FC) thin films were deposited on mold surfaces such as silicon and SU-8 to reduce the adhesion of surfaces with PDMS during molding processes. FC films coated silicon and SU-8 mold surface showed no degradation of PDMS surfaces and good nanotribological characteristics.
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© 2002 Springer Science+Business Media Dordrecht
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Kim, T. et al. (2002). Surface Modification of Micromolds by Fluorocarbon Films. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_147
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DOI: https://doi.org/10.1007/978-94-010-0295-0_147
Publisher Name: Springer, Dordrecht
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