Abstract
Microvalve architectures employing mobile polymer seating elements in glass substrates are presented. These valves can operate on chip with pressures above 3000 psi, at voltages above 1 kV, and in solvents including water, acetonitrile, and acetone. The valves open and close in milliseconds, and can be used to control, inject, and rout fluids. Closing a valve in a microchannel can cause a billion-fold reduction in the flow through that microchannel; this leak rate performance, combined with pressure and voltage compatibility, makes these valves useful for controlling and integrating practical high-pressure chromatographic or electrokinetic separations on microchips.
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© 2002 Springer Science+Business Media Dordrecht
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Kirby, B.J., Shepodd, T.J. (2002). Microvalve Architectures for High-Pressure Hydraulic and Electrokinetic Fluid Control in Microchips. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_113
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DOI: https://doi.org/10.1007/978-94-010-0295-0_113
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3952-9
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