Summary
Optimization of r.f. sputtered amorphous hydrogenated silicon thin films for solar cell applications is usually achieved by control of the hydrogen partial pressure, substrate temperature and r.f. power. This paper describes an additional technique of r.f. bias sputtering for further improvement in material properties. Preliminary results are included on the effect of substrate bias on the electrical and optical parameters of a-Si-H films and related devices. The substrate bias voltage considerably influences the photoconductivity, the illuminated Schottky diode performance and the d.c. room temperature conductivity but the deposition rate and activation energy are affected to a lesser degree; there is no appreciable change to the optical absorption edge.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
W.E. Spear et al. App. Phys. Lett., 28, 105, 1976.
I.G. Austin et al. Inst. of Phys. Conf. Series, No.43, 1155, 1978.
M.J. Thompson et al. Rev. de Phys. App., 13, 625, 1978.
W. Paul et al. Sol. St. Comm., 20, 969, 1976
M.J. Thompson et al. Proc. 2nd EEC Phot. Conf., Berlin, 303, 1979
L.I. Maissel et al. Jour. App. Phys., 36, 237, 1965.
E. Krikorian et al. Jour. App. Phys., 37, 3674, 1966
E. Kovy et al. Jour. App. Phys., 49, 4862, 1978.
Y. Igasaki et al. Thin. Sol. Films, 70, 17, 1980.
J. Perrin et al. Thin. Sol. Films, 62, 327, 1979.
H. Okamoto et al. J. Non-Crys. Sol. 35, 201, 1980.
M.P. Rosenblum et al. J. Non-Crys. Sol. 37, 45, 1980.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1981 ECSC, EEC, EAEC, Brussels and Luxembourg
About this paper
Cite this paper
Allison, J., Thompson, M.J., Turner, D.P., Thomas, I.P. (1981). Further Optimization of Amorphous Hydrogenated Silicon Films for Solar Cells by the Use of RF Bias-Sputtering. In: Palz, W. (eds) Photovoltaic Solar Energy Conference. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-8423-3_132
Download citation
DOI: https://doi.org/10.1007/978-94-009-8423-3_132
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-009-8425-7
Online ISBN: 978-94-009-8423-3
eBook Packages: Springer Book Archive