Abstract
An account is given of some new interferometric developments which can be used to improve the performance of the laser interferometer as a position sensing device. The first of these developments, termed the double pass attachment, is an optical accessory which doubles the resolution of the Hewlett-Packard linear and plane mirror interferometers. Unlike previous attempts to extend resolution optically, this device does not fold one of the two interfering beams and hence does not introduce error due to its own motion. The simple addition of a quarter wave plate to the attachment can be used to give a differential version of the plane mirror interferometer. Various configurations of this differential interferometer, and their application to machine tool and integrated circuit lithographic and inspection equipment, are discussed. A new “wavelength tracking” device, based on differential interferometry, is described. This device directly and precisely monitors changes in laser wavelength inside a highly stable mechanical cavity. It can be easily incorporated, as an additional interferometer axis, into precision machines to give superior compensation for changes in laser wavelength.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Murtz, M.V.R., Modification of Michel son Interferometer Using Only One Cube-Corner Prism, J. Opt. Soc. Am., Vol. 50, 83, 1960.
Tanimura, Y., A New Differential Interferometer with a Multiplied Optical Path Difference, Annals of the CIRP, Vo. 32, 449, 1983.
Quenelle, R.C., Nonlinearity in Interferometer Measurements, Hewlett-Packard Journal, P. 10, April 1983.
Berthold, J.W., Jacobs, S.F., Norton, M.A., Dimensional Stability of Fused Silica, Invar and Several Ultralow Thermal Expansion Materials, Applied Optics, Vol. 15, 1898, August 1976.
Edlen, B., The Refractive Index of Air, Metrologia, Vol. 2, No. 2, 71, 1966.
Jones, F., The Refractivity of Air, J. Res. NBS, Vol. 86, 27, 1981.
Estler, W.T., High-accuracy Displacement Interferometry in Air, NBS, Washington D.C. 20234, to be published.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1987 Martinus Nijhoff Publishers, Dordrecht
About this chapter
Cite this chapter
Siddall, G.J., Baldwin, R.R. (1987). Some Recent Developments in Laser Interferometry. In: Soares, O.D.D. (eds) Optical Metrology. NATO ASI Series, vol 131. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-3609-6_6
Download citation
DOI: https://doi.org/10.1007/978-94-009-3609-6_6
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-8115-3
Online ISBN: 978-94-009-3609-6
eBook Packages: Springer Book Archive