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Electro-Optical Modulating Multistack Device Based on the CMOS-Compatible Technology of Amorphous Silicon

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Sensors and Microsystems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 91))

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Abstract

We report results on a field-effect induced light modulation at ? = 1.55 ?m in a high-index-contrast waveguide based on a multisilicon-on-insulator (MSOI) platform. The device is realized with the hydrogenated amorphous silicon (?-Si:H) technology and it is suitable for monolithic integration in a CMOS integrated circuit. The device exploits the free carrier optical absorption electrically induced in the multistack core waveguide.

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References

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Acknowledgments

IMM-CNR (Naples, Italy) for optical simulations, G.T. Reed and W. Headley (University of Surrey, Guildford, UK) for helps in some experiments and for stimulating discussions.

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Authors and Affiliations

  1. Department of Information Science, Mathematics, Electronics and Transportations (DIMET) “Mediterranea” University, Via Graziella Loc. Feo di Vito, 89131, Reggio Calabria, Italy

    Sandro Rao & Francesco G. Della Corte

  2. Consiglio Nazionale delle Ricerche—Unit of Bologna, Institute for Microelectronics and Microsystems, Via Gobetti 101, 40129, Bologna, Italy

    Caterina Summonte

Authors
  1. Sandro Rao
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  2. Francesco G. Della Corte
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  3. Caterina Summonte
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Corresponding author

Correspondence to Sandro Rao .

Editor information

Editors and Affiliations

  1. , Dept. of Industrial Chemistry and Materi, University of Messina, Faculty of Engine, Contrada Di Dio, Messina, 98166, Italy

    Giovanni Neri

  2. , Dept. of Matter Physiscs and Electronic, University of Messina, Faculty of Engine, Contrada Di Dio, Messina, 98166, Italy

    Nicola Donato

  3. Dipto. Ingegneria Elettronica, Università di Roma, Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Arnaldo d'Amico

  4. , Dept. of Electronic Engineering, University of Rome Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Corrado Di Natale

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Rao, S., Della Corte, F.G., Summonte, C. (2011). Electro-Optical Modulating Multistack Device Based on the CMOS-Compatible Technology of Amorphous Silicon. In: Neri, G., Donato, N., d'Amico, A., Di Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 91. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-1324-6_44

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  • DOI: https://doi.org/10.1007/978-94-007-1324-6_44

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-1323-9

  • Online ISBN: 978-94-007-1324-6

  • eBook Packages: EngineeringEngineering (R0)

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