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© 2012 Springer Science+Business Media B.V.
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(2012). Ion Beam. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9751-4_100328
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DOI: https://doi.org/10.1007/978-90-481-9751-4_100328
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-9750-7
Online ISBN: 978-90-481-9751-4
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