Abstract
A novel biosensor based on silicon integrated micro-balances array for DNA hybridization electronic detection is presented. The microbalances have been implemented on a silicon substrate putting together low cost silicon membranes and piezoelectric resonator made up of an AlN film sandwiched between two metal layers. The mass change, occurring during the DNA hybridization process, is converted into resonant frequency change that can be easily measured. Mass sensitivities around 75 Hz/pg for a 200 × 200 μm2 membrane area and 300 Hz/pg for 100 × 100 μm2 area are expected.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Reference
G. Z. Sauerbrey, Z Phys. 155, 206 (1959).
C. K. O’ Sullivan, G. G. Guilbault, “Commercial quartz crystal microbalances-theory and applications”, Biosensors & Bioelectronics 14, 663–670, (1999).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2010 Springer Science+Business Media B.V.
About this paper
Cite this paper
Barlocchi, G., Mastromatteo, U., Villa, F.F. (2010). Silicon Integrated Micro-Balances Array for DNA Hybridization Electronic Detection. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_62
Download citation
DOI: https://doi.org/10.1007/978-90-481-3606-3_62
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-3605-6
Online ISBN: 978-90-481-3606-3
eBook Packages: EngineeringEngineering (R0)