Abstract
The purpose of this paper is to investigate the design methodology, test results, and potential applications of a high resolution and low thermal drift calibrated digital inclinometer based on a MEMS capacitive sensor. The inclinometer provides ±10° of measurement range in a rotational plane that is perpendicular to the earth’s gravity and it uses a primary sensing element based on high aspect ratio microstructures, processed by air gap insulated micro structure (AIM) technology. A signal conditioning electronics, processing the MEMS signals, enables flexibility in terms of linearization, thermal compensation and signal calibration. Resolution of ±0.002° has been found around 0° together with a thermal zero drift lower than ±0.002°/°C from 0°C to +50°C. The overall system consumes 15 mA dc current from a 5V supply. Examples of application fields include: platform stabilization, drill orientation, event detection and telematics/GPS.
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References
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Crescini, D., Baù, M., Ferrari, V. (2010). MEMS Tilt Sensor with Improved Resolution and Low Thermal Drift. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_43
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DOI: https://doi.org/10.1007/978-90-481-3606-3_43
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