Skip to main content

Photoconductive Position Sensitive CVD Diamond Detectors

  • Conference paper
  • First Online:
Sensors and Microsystems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 54))

  • 2135 Accesses

Abstract

Different contact structures were studied to realize CVD-diamond sensors able to detect light beam displacements. Photons irradiate the sample backside where a mesh contact is used for device biasing. Photogenerated carriers are collected at the top-side where metal strip lines are realized. Depending on the layout of such contacts, beam displacement is measured by means of the elaboration of acquired strip signals. A very compact front-end electronics was used for signal conditioning. As for an image sensor array, the signal of each strip is integrated in the same time-period. Analog to digital conversion is performed in a second time period by means of high-resolution σ-δ converters and digital filtering. During such a second time-period, strip line photocurrents are integrated by a second set of ideal integrators allowing signal acquisition in a continuous-mode fashion. Limited by the 500 μs conversion time of ADCs, the detection system allows up to 2 kSPS data output acquisition rate.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. M.D. Whitfield, S.P. Lansley, O. Gaudin, R.D. McKeag, N. Rizvi and R.B. Jackman, “Diamond photodetectors for next generation 157-nm deep-UV photolithography tools”, Diam. Relat. Mater., [10], pp. 693–697, 2001.

    Article  Google Scholar 

  2. G. Mazzeo, S. Salvatori, V. Ralchenko and G. Conte, “Design and test of deep-UV position sensitive detectors”, Sensors 2004 – Proc. IEEE, [3], pp. 1554–1557, Oct. 2004.

    Article  Google Scholar 

  3. K. Tsuji, K. Hayashi, J.H. Kaneko, F. Fujita, A. Homma, Y. Oshiki, T. Sawamura and M. Furusaka, “Development of high resolution position sensitive UV detector based on highly oriented polycrystalline diamond”, Diam. Relat. Mater., [14], pp. 2035–2038, 2005.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2010 Springer Science+Business Media B.V.

About this paper

Cite this paper

Girolami, M., Allegrini, P., Conte, G., Salvatori, S. (2010). Photoconductive Position Sensitive CVD Diamond Detectors. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_17

Download citation

  • DOI: https://doi.org/10.1007/978-90-481-3606-3_17

  • Published:

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-3605-6

  • Online ISBN: 978-90-481-3606-3

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics