Abstract
The incidence of electron waves in TEM and STEM causes the transmission of electrons (=electric current) with a high energy larger than 100 keV. Particularly, heating of specimens by the Joule heat , knock-on at an atomic nucleus due to the momentum transfer from moving electrons , and bond breaking due to electronic excitation are occurred. As a result, atomistic structures are changed, which is named electron irradiation effects or damages.
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Notes
- 1.
This chapter is written with reference to a paper by Hobbs (1983).
References
Bethe, H. (1930). Annalen der Physik, 5, 325.
Hobbs, L. W. (1983). In Quantitative electron microscopy, J. N. Chapman & A. J. Craven (Eds.), (Proceedings of 25th Scottish University School in Physics).
Kruit, P., et al. (2016). Ultramicroscopy, 164, 31.
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Tanaka, N. (2017). Electron Beam Damage to Specimens. In: Electron Nano-Imaging. Springer, Tokyo. https://doi.org/10.1007/978-4-431-56502-4_23
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DOI: https://doi.org/10.1007/978-4-431-56502-4_23
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