Abstract
An example is given to show that the Fourier self-deconvolution technique, i.e., spectral deconvolution using Fourier transforms and the intrinsic line-shape, can be used to better resolve the infrared absorption spectra of chemical impurities in semiconductors.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
J. K. Kauppinen, D. J. Moffatt, H. H. Mantsch, D. G. Cameron, Anal. Chem. 1981, 53, 1454.
J. B. Robertson, R. K. Franks, Solid State Commun. 1968, 6, 825.
R. K. Crouch, J. B. Robertson, T. E. Gilmer, Jr., Phys. Rev. B 1972, 5, 3111.
J. W. Cross, L. T. Ho, A. K. Ramdas, R. Sauer, E. E. Haller, Phys. Rev. B 1983, 28, 6953.
R. A. Chapman, W. G. Hutchinson, Phys. Rev. 1967, 157, 615.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1997 Springer-Verlag Wien
About this paper
Cite this paper
Ho, L.T. (1997). Application of the Fourier Self-deconvolution Technique to Infrared Spectra of Chemical Impurities in Semiconductors. In: Mink, J., Keresztury, G., Kellner, R. (eds) Progress in Fourier Transform Spectroscopy. Mikrochimica Acta Supplement, vol 14. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6840-0_113
Download citation
DOI: https://doi.org/10.1007/978-3-7091-6840-0_113
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-82931-8
Online ISBN: 978-3-7091-6840-0
eBook Packages: Springer Book Archive