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Comparison of Back-Foil Scanning X-Ray Microfluorescence and Electron Probe X-Ray Microanalysis for the Elemental Characterisation of Thin Coatings

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Microbeam and Nanobeam Analysis

Part of the book series: Mikrochimica Acta Supplement ((MIKROCHIMICA,volume 13))

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Abstract

Back-foil scanning X-ray microfluorescence, developed in a scanning electron microscope and applied for the analysis of very thin coatings is compared with electron probe X-ray microanalysis (EPMA). Both experimental results and Monte-Carlo calculations are used in this respect. The signal to background ratio as a function of the primary electron beam energy and angle of incidence and for different film thicknesses is obtained for both techniques and a comparative study of sensitivity is made. Back-foil scanning X-ray microfluorescence (SXRF) used in optimised experimental conditions, is found to be more sensitive than EPMA, especially in the case of film thicknesses below ≈ 100 nm. The resolving power of back-foil SXRF is also calculated for the anode used by Monte-Carlo simulations.

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Author information

Authors and Affiliations

  1. Institute of Microelectronics, NRCPS “Demokritos”, P.O. Box 60228, 153 10, Aghia Paraskevi, Attiki, Greece

    Evangelos Valamontes & Androula G. Nassiopoulos

Authors
  1. Evangelos Valamontes
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  2. Androula G. Nassiopoulos
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Editor information

Editors and Affiliations

  1. Beauchamp, France

    Daniele Benoit

  2. Department PAP/CDP/CMT, C.N.E.T. France Telecom, Bagneux, France

    Jean-Francois Bresse

  3. Department of Chemistry, University of Antwerp (UIA), Antwerp-Wilrijk, Belgium

    Luc Van’t dack

  4. Waalre, The Netherlands

    Helmut Werner

  5. Institut für angewandte und technische Physik, Technische Universität, Wien, Austria

    Johann Wernisch

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© 1996 Springer-Verlag Wien

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Valamontes, E., Nassiopoulos, A.G. (1996). Comparison of Back-Foil Scanning X-Ray Microfluorescence and Electron Probe X-Ray Microanalysis for the Elemental Characterisation of Thin Coatings. In: Benoit, D., Bresse, JF., Van’t dack, L., Werner, H., Wernisch, J. (eds) Microbeam and Nanobeam Analysis. Mikrochimica Acta Supplement, vol 13. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6555-3_55

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  • DOI: https://doi.org/10.1007/978-3-7091-6555-3_55

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-82874-8

  • Online ISBN: 978-3-7091-6555-3

  • eBook Packages: Springer Book Archive

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