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Transistoren und Siliziumtechnologie

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Mikrosystemtechnik

Part of the book series: Technik im Fokus ((TECHNIK))

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Authors and Affiliations

  1. Institut für Mikrotechnik, Technische Universität Braunschweig, Braunschweig, Deutschland

    Stephanus Büttgenbach

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  1. Stephanus Büttgenbach
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Büttgenbach, S. (2016). Transistoren und Siliziumtechnologie. In: Mikrosystemtechnik. Technik im Fokus. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-49773-9_2

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