Microsystem Technology and Microrobotics

1. Front Matter

   Pages I-XII

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2. Ideas and Problems of Microsystem Technology and Microrobotics

   • Sergej Fatikow, Ulrich Rembold

   Pages 1-23

3. Microsystem Technology Applications

   • Sergej Fatikow, Ulrich Rembold

   Pages 24-45

4. Techniques of Microsystem Technology

   • Sergej Fatikow, Ulrich Rembold

   Pages 46-65

5. Key Processes to Produce Micromechanical Components

   • Sergej Fatikow, Ulrich Rembold

   Pages 66-108

6. Microactuators: Principles and Examples

   • Sergej Fatikow, Ulrich Rembold

   Pages 109-208

7. Microsensors: Principles and Examples

   • Sergej Fatikow, Ulrich Rembold

   Pages 209-262

8. MST and Information Processing

   • Sergej Fatikow, Ulrich Rembold

   Pages 263-302

9. Microrobotics

   • Sergej Fatikow, Ulrich Rembold

   Pages 303-365

10. Back Matter

    Pages 366-408

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

• Sensor
• actuator
• control
• development
• information
• microsystems
• robot
• robotics
• complexity

• TU Karlsruhe, Karlsruhe, Germany

  Sergej Fatikow, Ulrich Rembold

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