Abstract
In the very near future the first book on Atomic Layer Epitaxy (ALE) will be published containing a separate chapter on chemical aspects of the ALE process /1/. Therefore the present paper is only a brief summary on electroluminescent (EL). materials grown by the ALE method.
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References
M. Leskelä, L. Niinistö: In Atomic Layer Epitaxy, ed. by T. Suntola, Blackwell and Sons (Blackwell, Glasgow 1988) in press.
T. Suntola, J. Antson: U.S. 4 058 430 (1977).
C. H. L. Goodman and M.V. Pessa, J. Appl. Phys. 60 R65 (1986).
T. Suntola, A. Pakkala, S. Lindfors: U.S. 4 389 973 (1983).
T. Suntola, J. Hyvärinen: Ann. Rev. Mater. Sci. 15 177 (1985).
M. Leskelä, M. Mäkelä, L. Niinistö, E. Nykänen, M. Tammenmaa: Chemtronics 3 113 (1988).
M. Tammenmaa, H. Antson, M. Asplund, L. Hiltunen, M. Leskelä, L. Niinistö, E. Ristolainen: J. Cryst. Growth 84 151 (1987).
M. Tammenmaa, M. Leskelä, L. Niinistö, T. Koskinen: J. Less-Common Met. 126 209 (1986).
M. Asplund, J. Hölsä, M. Leskelä, L. Niinistö: Inorg. Chim. Acta 139 261 (1987).
M. Tammenmaa, T. Koskinen, L. Hiltunen, M. Leskelä, L. Niinistö: Thin Solid Films 124 125 (1985).
T. Sutela: Display Technol. Appl. 5 73 (1984).
A. Hunter, A.H. Kitai: J. Cryst. Growth 91 111 (1988).
M. Leskelä, M. Tammenmaa: Mater. Chem. Phys. 16 349 (1987).
S. Tanaka, V. Shanker, M. Shiiki, H. Deguchi, H. Kobayashi: Proceedings of SID 26/4 255 (1987).
S.M. Bedair: In Atomic Layer Epitaxy, ed. by T. Suntola, Blackwell and Sons (Blackwell, Glasgow 1988) in press.
J.B. Mullin, S.J.V. Irvine, D.J. Ashen: J. Cryst. Growth 55 92 (1981).
M. Oikkonen: Thesis, Helsinki University of Technology, Espoo 1988, 46 pp.
M. Leskelä, M. Mäkelä, L. Niinistö, E. Nykänen, P. Soininen: in Compound Semiconductor Growth Processing and Devices for the 1990’s. Gainesville FL 1987, p. A7.
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© 1989 Springer-Verlag Berlin, Heidelberg
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Leskelä, M. (1989). Electroluminescent Materials Grown by Atomic Layer Epitaxy. In: Shionoya, S., Kobayashi, H. (eds) Electroluminescence. Springer Proceedings in Physics, vol 38. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-93430-8_44
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DOI: https://doi.org/10.1007/978-3-642-93430-8_44
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-93432-2
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