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Festkörperabtragung mit Lasern und Dünnschichtabscheidung

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Book cover Angewandte Laserchemie

Part of the book series: Laser in Technik und Forschung ((LASER TECHNIK))

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Zusammenfassung

Der Inhalt des vorliegenden Kapitels verdient einige Erklärungen zur inhaltlichen Abgrenzung gegenüber dem eng verwandten Laserbohren, Laserritzen, Laserschneiden und Laserfräsen sowie zum Begriff laserchemisches Ätzen, der in der Literatur unterschiedlich verwendet wird.

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Stafast, H. (1993). Festkörperabtragung mit Lasern und Dünnschichtabscheidung. In: Angewandte Laserchemie. Laser in Technik und Forschung. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-51140-0_8

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