Abstract
Over the recent years, the laser technology and its potentials have been exciting laser manufacturers as well as researchers and industrial users. Lasers with their excellent beam quality promised noticeable advantages and improvements in high precision and material processing at the microscale. Besides the excellent beam quality there are more advantages of the laser technology such as compact installation size, high laser efficiency, moderate system price and easy to be integrated. This chapter describes the results of different short pulse laser systems in a wide field of applications, showing specific advantages in practical applications. Typical applications of laser micro machining have been chosen including drilling, cutting, structuring, lateral material removal as well as marking.
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© 2011 Springer-Verlag Berlin Heidelberg
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Klotzbach, U., Lasagni, A.F., Panzner, M., Franke, V. (2011). Laser Micromachining. In: Lasagni, F., Lasagni, A. (eds) Fabrication and Characterization in the Micro-Nano Range. Advanced Structured Materials, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-17782-8_2
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DOI: https://doi.org/10.1007/978-3-642-17782-8_2
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