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Scanning Probe Alloying Nanolithography

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Scanning Probe Microscopy in Nanoscience and Nanotechnology

Part of the book series: NanoScience and Technology ((NANO))

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Summary

The probe-based nanolithography method is attracting increasing attentions due to its unique and simple process characteristics. This chapter, first, provides a brief review of nanolithography in order to see where the probe-based nanolithography current stands. Subsequently, it discusses the roles of probe-based nanolithography in the nanoscience and technology. Followed are some examples of the nanofabrication processes using the probe-based lithography method. At the later part of the chapter, new applications in nanofabrication and nanoalloying are discussed.

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Acknowledgements

This work was sponsored by the National Science Foundation (grant number 0506082).

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Authors and Affiliations

  1. M.S. 3123, Texas A&M University, College Station, TX, 77843-3123, USA

    Luohan Peng & Hyungoo Lee

  2. Mechanical Engineering Texas A&M University, College Station, TX, 77843-3123, USA

    Hong Liang

Authors
  1. Luohan Peng
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  2. Hyungoo Lee
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  3. Hong Liang
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Correspondence to Luohan Peng .

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  1. Nanoprobe Lab. Bio- & Nanotechnology &, Ohio State University, West 19th Avenue 201, Columbus, 43210-1142, U.S.A.

    Bharat Bhushan

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Peng, L., Lee, H., Liang, H. (2010). Scanning Probe Alloying Nanolithography. In: Bhushan, B. (eds) Scanning Probe Microscopy in Nanoscience and Nanotechnology. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03535-7_23

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