Abstract
An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.
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Reithmeier, E., Vynnyk, T. (2008). An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM. In: Breitner, M.H., Denk, G., Rentrop, P. (eds) From Nano to Space. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74238-8_5
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DOI: https://doi.org/10.1007/978-3-540-74238-8_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-74237-1
Online ISBN: 978-3-540-74238-8
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