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Integrated Micro-Optics

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MEMS: A Practical Guide to Design, Analysis, and Applications

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Abstract

Microelectromechanical systems (MEMS), as the name suggests, are predisposed to the use of electrons and mechanical movement. By adding optics to the palette of MEMS capabilities, the resultant micro-opto-electromechanical systems (MOEMS) or micro-opto-mechanical systems (MOMS) provide increased functionality while retaining the attractive features of MEMS technology. As the spectrum of potential applications can thus be substantially increased, research and development work on optical MEMS has recently seen considerable activity.[1,2]

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Authors and Affiliations

  1. Institute of Microsystem Technology IMTEK, University of Freiburg, Germany

    Hans Zappe

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  1. Hans Zappe
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Editors and Affiliations

  1. Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany

    Jan G. Korvink  & Oliver Paul  & 

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© 2006 William Andrew, Inc.

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Zappe, H. (2006). Integrated Micro-Optics. In: Korvink, J.G., Paul, O. (eds) MEMS: A Practical Guide to Design, Analysis, and Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-33655-6_8

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  • DOI: https://doi.org/10.1007/978-3-540-33655-6_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-21117-4

  • Online ISBN: 978-3-540-33655-6

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