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Table of contents (10 chapters)
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Front Matter
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Back Matter
Authors and Affiliations
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Technischen Universität, München, Deutschland
W. Harth
About the author
Technische Universität München
Unter Mitwirkung von
J. Freyer
München
Bibliographic Information
Book Title: Halbleitertechnologie
Authors: W. Harth
Series Title: Teubner Studienskripte Technik
DOI: https://doi.org/10.1007/978-3-322-94051-3
Publisher: Vieweg+Teubner Verlag Wiesbaden
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eBook Packages: Springer Book Archive
Copyright Information: Springer Fachmedien Wiesbaden 1981
Softcover ISBN: 978-3-519-10054-6Published: 01 January 1981
eBook ISBN: 978-3-322-94051-3Published: 09 March 2013
Edition Number: 2
Number of Pages: 135
Number of Illustrations: 38 b/w illustrations
Topics: Engineering, general