Abstract
This paper presents the bond-graph modeling of the Atomic force microscope. The Atomic force microscope is modeled as a lumped parameter system in its dynamic contact mode of operation. The Derjaguin–Muller–Toporov (DMT) force is considered as the interaction of the cantilever tip with the sample surface, and it introduces the nonlinearity to the model. The response of the model is obtained through bond graph by using a 20-sim program. Results are compared with results obtained by SIMULINK in MATLAB.
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Acknowledgements
The author would like to sincerely thank Professor V. V. Eliseev, who supported this research.
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Bahrami, M.R., Abeygunawardana, A.W.B. (2018). Modeling and Simulation of Tapping Mode Atomic Force Microscope Through a Bond-Graph. In: Evgrafov, A. (eds) Advances in Mechanical Engineering. Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-72929-9_2
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DOI: https://doi.org/10.1007/978-3-319-72929-9_2
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