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Porous Silicon Membranes

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Handbook of Porous Silicon

Abstract

Porosified silicon membranes of defined thicknesses were first studied in the 1990s and have now been realized by electrochemical anodization, micromachining techniques, and the annealing of ultrathin deposited films. The three fabrication routes produce very different morphologies and levels of porosity. A variety of applications have been explored for both macroporous and mesoporous membranes and these are also surveyed. Wholly microporous membranes in silicon, where all pores have diameters less than 2 nm, have not been achieved to date.

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Authors and Affiliations

  1. School of Physics and Astronomy, University of Birmingham, Geraldine Road, WR 14 3 SZ, Birmingham, Worcestershire, UK

    Leigh Canham

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  1. Leigh Canham
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Correspondence to Leigh Canham .

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  1. School of Physics and Astronomy, University of Birmingham, Birmingham, Worcestershire, United Kingdom

    Leigh Canham

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Canham, L. (2018). Porous Silicon Membranes. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-71381-6_16

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