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Thin Film Growth in Nanostructured Materials

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Growth and Transport in Nanostructured Materials

Part of the book series: SpringerBriefs in Materials ((BRIEFSMATERIALS))

Abstract

In this chapter we focus on the impact that reactive transport and surface kinetics have on the coating of nanostructured and high surface area materials. We cover a series of approximations, including line of sight, constant reaction probability, more complex non-self limited kinetics characteristic from chemical vapor deposition, and self-limited interactions typical from atomic layer deposition. Different criteria to achieve highly conformal growth inside nanostructured or high surface area materials are introduced.

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Authors and Affiliations

  1. Northwestern-Argonne Institute of Science and Engineering, Northwestern University, Evanston, Illinois, USA

    Angel Yanguas-Gil

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  1. Angel Yanguas-Gil
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Correspondence to Angel Yanguas-Gil .

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Yanguas-Gil, A. (2017). Thin Film Growth in Nanostructured Materials. In: Growth and Transport in Nanostructured Materials. SpringerBriefs in Materials. Springer, Cham. https://doi.org/10.1007/978-3-319-24672-7_4

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