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Recent progresses in R&D of methods to fabricate inch-sized diamond wafers

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Materials Challenges and Testing for Manufacturing, Mobility, Biomedical Applications and Climate

Abstract

To realize industrial use of excellent characteristics of single-crystal diamond, we have developed techniques to fabricate the wafers with inch-size area. Artificial growth of the bulk crystals and a lift-off process to synthesize the freestanding wafers from the seed wafers can be successfully conducted. In this paper, motive forces of our research as well as presented status of related techniques are briefly summarized, as well as our recent progresses.

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Author information

Authors and Affiliations

  1. Diamond Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midoriga-oka, Ikeda, Osaka, 5638577, Japan

    Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Nobuteru Tsubouchi & Shin-ichi Shikata

Authors
  1. Hideaki Yamada
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  2. Akiyoshi Chayahara
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  3. Yoshiaki Mokuno
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  4. Nobuteru Tsubouchi
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  5. Shin-ichi Shikata
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Editor information

Editors and Affiliations

  1. National Metal and Materials Technology Center (MTEC), KlongLuang Pathumtani, Thailand

    Werasak Udomkichdecha

  2. BAM Bundesanstalt für Material- forschung und -prüfung, Berlin, Berlin, Germany

    Thomas Böllinghaus

  3. National Metal and Materials Technology, Klong 1, Klong Luang, Pathumthani, Thailand

    Anchalee Manonukul

  4. BAM Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany

    Jürgen Lexow

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Cite this chapter

Yamada, H., Chayahara, A., Mokuno, Y., Tsubouchi, N., Shikata, Si. (2014). Recent progresses in R&D of methods to fabricate inch-sized diamond wafers. In: Udomkichdecha, W., Böllinghaus, T., Manonukul, A., Lexow, J. (eds) Materials Challenges and Testing for Manufacturing, Mobility, Biomedical Applications and Climate. Springer, Cham. https://doi.org/10.1007/978-3-319-11340-1_10

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