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Optical Breakdown in Ambient Gas and Its Role in Material Processing by Short-Pulsed Lasers

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Fundamentals of Laser-Assisted Micro- and Nanotechnologies

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 195))

Abstract

Formation of gas breakdown plasma, staying apart from the surface of materials exposed to pulsed laser radiation, is shown to have a strong impact to productivity and accuracy of micromachining. Origin and effect of two types of such plasmas are described: one is induced by low threshold breakdown of ambient gas contaminated by charged ablated nanoparticles; which is characteristic of nano- and subnanosecond lased ablation; the second is caused by ionization of gas at the leading edge of focused pico- and femtosecond pulses. The ways to eliminate undesirable plasma effects are discussed and demonstrated.

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References

  1. A.I. Barchukov, F.V. Bunkin, V.I. Konov, A.A. Lyubin, JETP 39, 469 (1974)

    ADS  Google Scholar 

  2. S.M. Klimentov, T.V. Kononenko, P.A. Pivovarov, S.V. Garnov, V.I. Konov, A.M. Prokhorov, D. Braitling, F. Dausinger, Quantum Electron. 31, 378 (2001)

    Article  ADS  Google Scholar 

  3. S.M. Klimentov, T.V. Kononenko, S.V. Garnov, V.I. Konov, P.A. Pivovarov, F. Dausinger, Bull. Russ. Acad. Sci: Phys. 65, (2001)

    Google Scholar 

  4. S.M. Klimentov, S.V. Garnov, V.I. Konov, T.V. Kononenko, P.A. Pivovarov, O.G. Tsarkova, D. Breitling, F. Dausinger, Phys. Wave Phenom. 15, 1 (2007)

    Google Scholar 

  5. S.M. Klimentov, T.V. Kononenko, P.A. Pivovarov, V.I. Konov, A.M. Prokhorov, D. Breitling, F. Dausinger, Quantum Electron. 32, 433 (2002)

    Article  ADS  Google Scholar 

  6. S.V. Garnov, V.I. Konov, A.A. Malyutin, O.G. Tsarkova, I.S. Yatskovsky, F. Dausinger, Laser Phys. 13, 386 (2003)

    Google Scholar 

  7. R.E. Russo, X.L. Mao, H.C. Liu et al., Appl. Phys. A 69, S887 (1999)

    Article  ADS  Google Scholar 

  8. M. Schenk, M. Krüger, P. Hommelhoff, Phys. Rev. Lett. 105, 257601 (2010)

    Article  ADS  Google Scholar 

  9. S.E. Irvine, A. Dechant, A.Y. Elezzabi, Phys. Rev. Lett. 93, 184801 (2004)

    Article  ADS  Google Scholar 

  10. H.A. Sumeruk, S. Kneip et al., Phys. Plasmas 14, 062704 (2007)

    Article  ADS  Google Scholar 

  11. D. Breitling, A. Ruf, F. Dausinger, Proc. SPIE 5339, 49 (2004)

    Article  ADS  Google Scholar 

  12. S.M. Klimentov, V.I. Konov, P.A. Pivovarov, S.V. Garnov, T.V. Kononenko, F. Dausinger, Proc. SPIE. 6606, 0H1 (2007)

    Google Scholar 

  13. S.M. Klimentov, P.A. Pivovarov, V.I. Konov, D.S. Klimentov, F. Dausinger, Laser Phys. 18, 774 (2008)

    Article  ADS  Google Scholar 

  14. S.M. Klimentov, P.A. Pivovarov, V.I. Konov, D. Breitling, F. Dausinger, Quantum Electron. 34, 537 (2004)

    Article  ADS  Google Scholar 

  15. P. Berger, D. Breitling, F. Dausinger, Ch. Föhl, H. Hügel, S. Klimentov, T. Kononenko, V. Konov, German Patent DE 102 03 452 B4 (2007)

    Google Scholar 

  16. F. Colao, V. Lazic, R. Fantoni, S. Pershin, Spectrochim. Acta B 57, 1167 (2002)

    Article  ADS  Google Scholar 

  17. KhS Kestenboim, G.S. Roslyakov, L.A. Chudov, Tochechniy vzryv (Point Explos.) (Nauka, Moscow, 1974). [in Russian]

    Google Scholar 

  18. A.M. Prokhorov, V.I. Konov, I. Ursu, I.N. Mikheilesku, Interaction of Laser Radiation with Metals (Nauka, Moscow, 1988). [in Russian]

    Google Scholar 

  19. S.M. Klimentov, S.V. Garnov, T.V. Kononenko, V.I. Konov, P.A. Pivovarov, F. Dausinger, Appl. Phys. A 69, S633 (1999)

    Article  ADS  Google Scholar 

  20. T.T. Basiev, S.V. Garnov, C.M. Klimentov, P.A. Pivovarov, A.V. Gavrilov, S.N. Smetanin, S.A. Slolokhin, A.V. Ftdin, Quantum Electron. 37, 956 (2007)

    Article  ADS  Google Scholar 

  21. X.D. Wang, X. Yuan, S.L. Wang, J.S. Liu, A. Michalowski, F. Dausinger, in Advanced Design and Manufacture to Gain a Competitive Edge, 2008, p. 759

    Google Scholar 

  22. I.A. Bufetov, S.B. Kravtsov, V.B. Fyodorov, Quantum Electron. 26, 520 (1996)

    Article  ADS  Google Scholar 

  23. V.P. Ageev, A.I. Barchukov, F.V. Bunkin, V.I. Konov, S.B. Puzhaev, A.S. Silenok, N.I. Chapliev, Sov. J. Quantum Electron. 9, 43 (1979)

    Article  ADS  Google Scholar 

  24. S.M. Klimentov, V.I. Konov, P.A. Pivovarov, S.V. Garnov, T.V. Kononenko, F. Dausinger, Proc. SPIE. 6606, 66060H (2007)

    Article  ADS  Google Scholar 

  25. N.M. Bulgakova, V.P. Zhukov et al., Appl. Phys. A 92, 883 (2008)

    Article  ADS  Google Scholar 

  26. T. Riesbeck, Laser Phys. Lett. 5, 240 (2008)

    Article  ADS  Google Scholar 

  27. R.S. Taylor, C. Hnatovsky, E. Simova, D.M. Rayner, V.R. Bhardwaj, P.B. Corkum, Opt. Lett. 28, 1043 (2003)

    Article  ADS  Google Scholar 

  28. A.P. Joglekar, H. Liu, G.J. Spooner, E. Meyhöfer, G. Mourou, A.J. Hunt, Appl. Phys. B 77, 25 (2003)

    Article  Google Scholar 

  29. J. Krüger, W. Kautek, Laser Phys. 9, 30 (1999)

    Google Scholar 

  30. F. Dausinger, F. Lichtner, H. Lubatschowski (eds.), Femtosecond Technology for Technical and Medical Applications (Springer, Heidelberg, 2004)

    Google Scholar 

  31. S. Klimentov, P. Pivovarov, V. Konov, D. Walter, M. Kraus, F. Dausinger, Laser Phys. 19, 1282 (2009)

    Article  ADS  Google Scholar 

  32. S.M. Klimentov, P.A. Pivovarov, N. Fedorov, S. Guizard, F. Dausinger, V.I. Konov, Appl. Phys. B 105, 495 (2011)

    Article  ADS  Google Scholar 

  33. A. Braun, G. Korn, X. Liu, D. Du, J. Squier, G. Mourou, Opt. Lett. 20, 73 (1995)

    Article  ADS  Google Scholar 

  34. V.P. Kandidov, O.G. Kosareva, A.A. Koltun, Quant. Electron. 33, 69 (2003)

    Article  ADS  Google Scholar 

  35. S.C. Rae, Opt. Commun. 104, 330 (1994)

    Google Scholar 

  36. A. Couairon, G. Mechain, S. Tzorzakis et al., Opt. Commun. 222, 177 (2003)

    Article  ADS  Google Scholar 

  37. H. Koch, Ch. Hatting, H. Larsen et al., J. Chem. Phys. 111, 10108 (1999)

    Article  ADS  Google Scholar 

  38. E. Inbar, A. Arie, Appl. Phys. B70, 849 (2000)

    Article  ADS  Google Scholar 

  39. V.V. Bukin, S.V. Garnov, A.A. Malyutin, V.V. Strelkov, Quant. Electron. 37, 961 (2007)

    Article  ADS  Google Scholar 

  40. Y.R. Shen, Principles of Nonlinear Optics (Wiley-Interscience, New York, 1984)

    Google Scholar 

  41. N.V. Ammosov, N.B. Delone, V.P. Krainov, J. Exp. Theor. Phys. 94, 2008 (1986)

    Google Scholar 

  42. V. Popov, Phys.-Usp. 47, 855 (2004)

    Article  ADS  Google Scholar 

  43. F. Quéré, S. Guizard, Ph Martin, Europhys. Lett. 56, 138 (2001)

    Article  ADS  Google Scholar 

  44. B. Rethfeld, Phys. Rev. Lett. 92, 187401 (2004)

    Article  ADS  Google Scholar 

  45. H. Bachau, A.N. Belsky, P. Martin, A.N. Vasil’ev, B.N. Yatsenko, Phys. Rev. B 74, 235215 (2006)

    Article  ADS  Google Scholar 

  46. B. Rethfeld, K. Sokolowski-Tinten, D. von der Linde, S.I. Anisimov, Appl. Phys. A 79, 767 (2004)

    Article  ADS  Google Scholar 

  47. M. Bonn, D. Denzler, S. Funk, M. Wolf et al., Phys. Rev. B 61, 1101 (2000)

    Article  ADS  Google Scholar 

  48. M. Ligges, I. Rajkovic, P. Zhou, O. Posth, C. Hassel, G. Dumpich, D. von der Linde, Appl. Phys. Lett. 94, 101910 (2009)

    Article  ADS  Google Scholar 

  49. V.V. Kononenko, E.V. Zavedeev, M.I. Latushko, V.I. Konov, Laser Phys. Lett. 10, 036003 (2013)

    Article  ADS  Google Scholar 

  50. V.V. Kononenko, V.V. Konov, E.M. Dianov, Opt. Lett. 37, 3369 (2012)

    Article  ADS  Google Scholar 

  51. A. Mouskeftaras, S. Guizard, N. Fedorov, S. Klimentov, Appl. Phys. A 110, 709 (2013)

    Article  ADS  Google Scholar 

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Author information

Authors and Affiliations

  1. A. M. Prokhorov General Physics Institute of Russian Academy of Sciences, 38 Vavilova St., Moscow, Russia, 119991

    Sergey M. Klimentov & Vitaly I. Konov

Authors
  1. Sergey M. Klimentov
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  2. Vitaly I. Konov
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Correspondence to Sergey M. Klimentov .

Editor information

Editors and Affiliations

  1. Dept. Laser-based Technologies, NRU ITMO, St. Petersburg, Russia

    Vadim P. Veiko

  2. Natural Sciences Center, General Physics Institute RAS, Moscow, Russia

    Vitaly I. Konov

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Klimentov, S.M., Konov, V.I. (2014). Optical Breakdown in Ambient Gas and Its Role in Material Processing by Short-Pulsed Lasers. In: Veiko, V., Konov, V. (eds) Fundamentals of Laser-Assisted Micro- and Nanotechnologies. Springer Series in Materials Science, vol 195. Springer, Cham. https://doi.org/10.1007/978-3-319-05987-7_4

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