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Thermal Isolation with Porous Silicon

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Handbook of Porous Silicon

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Abstract

The exceptionally low thermal conductivity of highly porous silicon has led to its use as a thermal insulator within microsystems. A comprehensive review of thermal conductivity literature is provided, together with examples of its use in microsensing and microphotonic systems.

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Acknowledgements

This work was supported by the EU Network of Excellence FP7 “Nanofunction,” Contract No 257375.

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Authors and Affiliations

  1. NCSR Demokritos, Institute of Nanoscience and Nanotechnology (INN), Terma Patriarchou Grigoriou, Aghia Paraskevi, 15310, Athens, Greece

    Androula G. Nassiopoulou

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  1. Androula G. Nassiopoulou
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Correspondence to Androula G. Nassiopoulou .

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Editors and Affiliations

  1. Malvern, Worcestershire, United Kingdom

    Leigh Canham

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© 2014 Springer International Publishing Switzerland

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Nassiopoulou, A.G. (2014). Thermal Isolation with Porous Silicon. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-05744-6_77

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