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Porous Silicon Supercapacitors

Handbook of Porous Silicon

Abstract

Continuous miniaturization of electronic devices for portable and wearable applications requires miniaturized and integrated energy storage solutions for which electrochemical double-layer capacitors, the so-called supercapacitors, are among the best candidates. In this chapter, a short description of a supercapacitor structure, several advanced electrode materials, and device characterization techniques are presented. Development of porous silicon supercapacitors is reviewed including the first publications and discussion on the main advantages and problems related to porous silicon electrodes. Various passivation techniques of the surface, such as sputtering of metals, graphene coating, and atomic layer deposition, are described. In addition, potential on-chip integration of porous silicon capacitors with high capacitance and energy density is discussed.

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References

  • Alper JP, Vincent M, Carraro C, Maboudian R (2012) Silicon carbide coated silicon nanowires as robust electrode material for aqueous micro-supercapacitors. Appl Phys Lett 100:163901

    Article  Google Scholar 

  • Alper JP, Wang S, Rossi F, Salviati G, Yiu N, Carraro C, Maboudian R (2014) Selective ultrathin carbon sheath on porous silicon nanowires: materials for extremely high energy density planar microsupercapacitors. Nano Lett 14:1843–1847

    Article  Google Scholar 

  • Christen T, Carlen MW (2000) Theory of Ragone plots. J Power Sources 91:210–216

    Article  Google Scholar 

  • Christen T, Carlen, MW, Ohler Ch (1999) Energy-power relations of supercaps from impedance spectroscopy data. Proc. of 9th international seminar on double layer capacitors and similar energy storage devices, Florida, 6–8 Dec 1999

    Google Scholar 

  • Cohn AP, Erwin WR, Share K, Oakes L, Westover AS, Carter RE, Bardhan R, Pint CL (2015) All silicon electrode photocapacitor for integrated energy storage and conversion. Nano Lett 15:2727–2731

    Article  Google Scholar 

  • Conway BE (1999) Electrochemical supercapacitors: scientific fundamentals and technological applications. Kluwer Academic/Plenum Publishers, New York

    Book  Google Scholar 

  • Desplobain S, Gautier G, Semai J, Ventura L, Roy M (2007) Investigation of porous silicon electrode material in electrochemical capacitors. Phys Status Solidi 4:2180–2184

    Article  Google Scholar 

  • El-Kady MF, Kaner RB (2013) Scalable fabrication of high-power graphene micro-supercapacitors for flexible and on-chip energy storage. Nat Commun 4:1475. doi:10.1038/ncomms2446

    Article  Google Scholar 

  • Gao W, Singh N, Song L, Liu Z, Reedy ALM, Ci L, Vajtai R, Zhang Q, Wei B, Ajayan PM (2011) Direct laser writing of micro-supercapacitors on hydrated graphite oxide films. Nat Nanotechnol 6:496–500

    Article  Google Scholar 

  • Gardner DS, Holxwarth CHW III, Liu Y, Clendenning SB, Jin W, Moon BK, Pint C, Chen Z, Hannach EC, Ch C, Ch W, Mäkilä E, Chen R, Aldridge T, Gustafson JL (2016) Integrated on-chip energy storage using passivated nanoporous-silicon electrochemical capacitors. Nano Energy 25:68–79

    Article  Google Scholar 

  • Gomez H, Ram MK, Alvi F, Villalba P, Stefanakos E, Kumar A (2011) Graphene-conducting polymer nanocomposite as novel electrode for supercapacitors. J Power Sources 196:4102–4108

    Article  Google Scholar 

  • Grigoras K, Airaksinen VM, Franssila S (2008) Coating of nanoporous membranes: atomic layer deposition versus sputtering. J Nanosci Nanotechnol 8:1–8

    Article  Google Scholar 

  • Grigoras K, Keskinen J, Grönberg L, Ahopelto J, Prunnila M (2014) Coated porous Si for high performance on-chip supercapacitors. J Phys Conf Ser 557:012058. doi:10.1088/1742-6596/557/1/012058

    Article  Google Scholar 

  • Grigoras K, Keskinen J, Grönberg L, Yli-Rantala E, Laakso S, Välimäki H, Kauranen P, Ahopelto J, Prunnila M (2016) Titanium nitride in a porous silicon matrix: a nanomaterial for in-chip supercapacitors. Nano Energy 26:340–345

    Article  Google Scholar 

  • Harrop P, Zhitomirsky V, Gonzalez F (2014) Electrochemical double layer capacitors: supercapacitors 2014–2024. IdTechEx report

    Google Scholar 

  • Hoffart F (2008) Proper care extends Li-ion battery life. Power Electron Technol April 2008:24–28

    Google Scholar 

  • Hsia B, Kim MS, Vincent M, Carraro M (2013) Photoresist-derived porous carbon for on-chip micro-supercapapcitors. Carbon 57:395–400

    Article  Google Scholar 

  • IdTechEX (2014): Supercapacitor markets 2014.2024. IdTechEX International Conf. on “Supercapacitors: Applications, Technologies & Opportunities” Nov. 19–20, Santa Clara

    Google Scholar 

  • Jiang Y, Lin L (2012) A two-stage, self-aligned vertical densification process for as-grown CNT forests in supercapacitor applications. Sensors Actuators A 188:261–267

    Article  Google Scholar 

  • Kemell M, Ritala M, Leskela M, Ossei-Wusu E, Carstensen J, Foll H (2007) Si/Al2O3/ZnO:Al capacitor arrays formed in electrochemically etched porous Si by atomic layer deposition. Microelectron Eng 84:313–318

    Article  Google Scholar 

  • Kötz R, Carlen M (2000) Principles and applications of electrochemical capacitors. Electrochim Acta 45:2483–2498

    Article  Google Scholar 

  • Lehmann V, Hönlein W, Reisinger H, Spitzer A, Wendt H, Willer J (1996) A novel capacitor technology based on porous silicon. Thin Solid Films 276:138–142

    Article  Google Scholar 

  • Lu X, Wang G, Zhai T, Yu M, Xie S, Ling Y, Liang C, Tong Y, Li Y (2012) Stabilized TiN nanowire arrays for high-performance and flexible supercapacitors. Nano Lett 12:5376–5381

    Article  Google Scholar 

  • Oakes L, Westover A, Mares JW, Chatterjee S, Ervin WR, Bardhan R, Weiss SM, Pint CL (2013) Surface engineered porous silicon for stable, high performance electrochemical supercapacitors. Sci Rep 3:3020. doi:10.1038/srep03020

    Article  Google Scholar 

  • Peter LM, Riley DJ, Wielgosz RI (1995) In situ monitoring of internal surface area during the growth of porous silicon. Appl Phys Lett 66:2355–2357

    Article  Google Scholar 

  • Roozeboom F, Elfrink R, Verhoeven J, van den Meerakher J, Holthuysen F (2000) High-value MOS capacitor arrays in ultradeep trenches in silicon. Microelectron Eng 53:581–584

    Article  Google Scholar 

  • Rowlands SE, Latham RJ, Schlindwein WS (1999) Supercapacitor devices using porous silicon electrodes. Ionics 5:144–149

    Article  Google Scholar 

  • Sailor MJ (2014) Chemical reactivity and surface chemistry of porous silicon. In: Canham L (ed) Handbook of porous silicon. Springer, Switzerland, pp 355–356

    Google Scholar 

  • Simon P, Gogotsi Y (2008) Materials for electrochemical capacitors. Nat Mater 7:845–854

    Article  Google Scholar 

  • Stoller MD, Ruoff RS (2010) Best practice methods for determining an electrode material’s performance for ultracapacitors. Energy Environ Sci 3:1294–1301

    Article  Google Scholar 

  • Thissandier F, Le Comte A, Crosnier O, Gentile P, Bidan G, Hadji E, Brousse T, Sadki S (2012) Highly doped silicon nanowires based electrodes for micro-electrochemical capacitor applications. Electrochem Commun 25:109–111

    Article  Google Scholar 

  • Thissandier F, Pauc N, Brousse T, Gentile P, Sadki S (2013) Micro-ultracapacitors with highly doped silicon nanowires electrodes. Nanoscale Res Lett 8:38

    Article  Google Scholar 

  • Warren R, Sammoura F, Tounsi F, Sanghadasa M, Lin L (2015) Highly active ruthenium oxide coating via ALD and electrochemical activation in supercapacitor applications. J Mater Chem A 3:15568–15575

    Article  Google Scholar 

  • Wu ZS, Parvez K, Feng X, Mullen K (2013) Graphene-based in-plane micro-supercapacitors with high power and energy densities. Nat Commun 4(2487). doi:10.1038/ncomms3487

    Google Scholar 

  • Wu ZS, Feng X, Cheng HM (2014) Resent advances in graphene-based planar micro-supercapacitors for on-chip energy storage. Natl Sci Rev. doi:10.1093/nsr/nwt003

    Google Scholar 

  • Xu B, Chen Y, Wei G, Cao G, Zhang H, Yang Y (2010) Activated carbon with high capacitance prepared by NaOH activation for supercapacitors. Mater Chem Phys 124:504–509

    Article  Google Scholar 

  • Yu A, Davies A, Chen Z (2012) Electrochemical supercapacitors. In: Liu RS et al (eds) Electrochemical technologies for energy storage and conversion. Wiley-VCH, Weinheim, pp 317–380

    Chapter  Google Scholar 

  • Yu D, Goh K, Wang H, Wei L, Jiang W, Zhang Q, Dai L, Chen Y (2014) Scalable synthesis of hierarchically structured carbon nanotube-graphene fibres for capacitive energy storage. Nat Nanotechnol 9:555. doi:10.1038/nnano.2014.93

    Article  Google Scholar 

  • Zhang Y, Feng H, Wu X, Wang L, Zhang A, Xia T, Dong H, Li X, Zhang L (2009) Progress of electrochemical capacitor electrode material. Int J Hydrog Energy 43:4889–4899

    Article  Google Scholar 

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Grigoras, K., Ahopelto, J., Prunnila, M. (2016). Porous Silicon Supercapacitors. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_116-1

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  • DOI: https://doi.org/10.1007/978-3-319-04508-5_116-1

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-04508-5

  • Online ISBN: 978-3-319-04508-5

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  1. Latest

    Porous Silicon Supercapacitors
    Published:
    09 February 2017

    DOI: https://doi.org/10.1007/978-3-319-04508-5_116-2

  2. Original

    Porous Silicon Supercapacitors
    Published:
    23 December 2016

    DOI: https://doi.org/10.1007/978-3-319-04508-5_116-1