Abstract
This paper presents the design, fabrication, and characterization of a thin-film Cr-Al-Cr (300 A°-1500 A°-300 A°) metal stack heater specially designed for chemical reactions which occur at a uniform temperature in the lab on a chip platform such as polymerase chain reaction (PCR) applications. The heater has been designed using COMSOL Multiphysics. The simulated design has been fabricated using lithography and patterning on a 5 × 5 cm2 glass substrate. For the validation of the proposed design thermal study of the fabricated heater has also been done using a FLIR IR camera. A very good agreement between the thermal image of modeled and fabricated heater has been achieved. This demonstrates the suitability of the proposed heater for PCR reaction applications.
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Zahra, A., de Cesare, G., Caputo, D., Abbas, Z. (2023). Thermal Study of Thin-Film Heater for PCR Reaction-Based Applications. In: Pandey, A.K., Pal, P., Nagahanumaiah, Zentner, L. (eds) Microactuators, Microsensors and Micromechanisms. MAMM 2022. Mechanisms and Machine Science, vol 126. Springer, Cham. https://doi.org/10.1007/978-3-031-20353-4_21
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DOI: https://doi.org/10.1007/978-3-031-20353-4_21
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