Abstract
Atomic force microscope (AFM) is a powerful tool for imaging a wide range of materials with nanometer resolution, which is sensitive to mechanical vibration from the ground or buildings. For improving imaging performance, vibration isolation systems are often employed. Air tables are often used to attenuate the vibration transmission from ground to precision instruments, but it performs poorly for low-frequency vibration isolation. Suspending AFM using long common bungee cords is a simple and effective vibration isolation method which perform well in both low-frequency and high-frequency domain. However, it requires a lot of space and the bungee cords will failure when using a long time. Here we developed a vibration isolation system that uses linear steel springs to suspend the AFM for high precision imaging. The simplified model is used to explain how the spring constant and the damper affects the vibration isolation performance, through experiment the relationship between the spring constant and the damper was verified. The accelerometer and the AFM were employed to show the isolation performance, it shows the noise level of the AFM can be reduced from 71 pm to 21 pm.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Binnig, G., Gerber, C., Stoll, E., Albrecht, T.R., Quate, C.F.: Atomic resolution with atomic force microscope. Epl. 3(12) (1987)
Dufrêne, Y.F.: Towards nanomicrobiology using atomic force microscopy. Nat. Rev. Microbiol. 6(9), 674–680 (2008)
Giessibl, F.J.: Advances in atomic force microscopy. Rev. Mod. Phys. 75(3), 949–983 (2003)
Ando, T.: High-speed atomic force microscopy coming of age. Nanotechnology 23(6), 062001 (2012)
Chaudhuri, O., Parekh, S.H., Lam, W.A., Fletcher, D.A.: Combined atomic force microscopy and side-view optical imaging for mechanical studies of cells. Nat. Methods 6(5), 383–387 (2009)
Voigtländer, B., Coenen, P., Cherepanov, V., Borgens, P., Duden, T., Tautz, F.S.: Low vibration laboratory with a single-stage vibration isolation for microscopy applications. Rev. Sci. Instrum. 88(2), 1–8 (2017)
Kamesh, D., Pandiyan, R., Ghosal, A.: Passive vibration isolation of reaction wheel disturbances using a low frequency flexible space platform. J. Sound Vib. 331(6), 1310–1330 (2012)
Hansma, H.G., Laney, D.E.: Applications for atomic force microscopy of DNA. Biophys. J. 68(5), 1672–1677 (1995)
Liu, C., Jing, X., Daley, S., Li, F.: Recent advances in micro-vibration isolation. Mech. Syst. Signal Process. 56, 55–80 (2015)
Wang, C., Xie, X., Chen, Y., Zhang, Z.: Investigation on active vibration isolation of a Stewart platform with piezoelectric actuators. J. Sound Vib. 383, 1–19 (2016)
Tjepkema, D., Van, D.J.: Sensor fusion for active vibration isolation in precision equipment. J. Sound Vib. 331(4), 735–749 (2012)
Gu, F., Rehab, I., Tian, X., Ball, A.D.: The influence of rolling bearing clearances on diagnostic signatures based on a numerical simulation and experimental evaluation. Int. J. Hydromechatronics 1(1), 1–16 (2018)
Hermsdorf, G.L., Szilagyi, S.A., Rösch, S., Schäffer, E.: High performance passive vibration isolation system for optical tables using six-degree-of-freedom viscous damping combined with steel springs. Rev. Sci. Instrum. 90(1), 1–7 (2019)
Chen, D., Yin, B., Liu, J., Li, W., Wu, L., Li, H.: Active disturbance rejection control design for fast AFM. Key Eng. Mater. 645, 670–674 (2015)
Li, Q., Zhu, Y., Xu, D., Hu, J., Min, W., Pang, L.: A negative stiffness vibration isolator using magnetic spring combined with rubber membrane. J. Mech. Sci. Technol. 27(3), 813–824 (2013)
Acknowledgments
Supported by the National Natural Science Foundation of China (Grants 61925307,61927805 and U1813210), Youth Program of National Natural Science Foundation of China (Grants 61903359) and the Instrument Developing Project of the Chinese Academy of Sciences (Grant No. YJKYYQ20180027).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2021 Springer Nature Switzerland AG
About this paper
Cite this paper
Zhai, S., Yu, P., Shi, J., Yang, T., Liu, L. (2021). Systematic Analyses of Passive Vibration Isolation System for Atomic Force Microscopes. In: Liu, XJ., Nie, Z., Yu, J., Xie, F., Song, R. (eds) Intelligent Robotics and Applications. ICIRA 2021. Lecture Notes in Computer Science(), vol 13014. Springer, Cham. https://doi.org/10.1007/978-3-030-89098-8_41
Download citation
DOI: https://doi.org/10.1007/978-3-030-89098-8_41
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-89097-1
Online ISBN: 978-3-030-89098-8
eBook Packages: Computer ScienceComputer Science (R0)