Abstract
This paper presents the design and control of a normal-stressed electromagnetic actuated nano-positioning stage. The principle of the stage is discussed in detail. Induction and assembling relationships related to the cube armature are elaborately designed. As a result, through simple mechanism structure and only one actuator, the designed stage can realize linear motion without parasitic motion. To predict the performance of the stage, both the normal-stressed electromagnetic actuator (NSEA) and the mechanical structure are analyzed via finite element method. A prototype with a 12.60 \(\upmu \)m working stroke and a first resonant frequency 4154 Hz is fabricated. To enhance the tracking accuracy, a control scheme with a PI controller and a notch filter is designed, and a −3 dB control bandwidth 2327 Hz is achieved. Triangular wave trajectory tracking tests are carried out. The results show the closed-loop system achieves a rms error of 1.34% when tracking a 10 \(\upmu \)m P-V amplitude, 200 Hz triangular wave, which is much lower than the open-loop error of 5.01%, verifying the effectiveness of the nano-positioning stage and the designed control method.
This work was partially supported by the National Natural Science Foundation of China under Grant No. U2013211 and Grant No. 51975375, the Open Foundation of the State Key Laboratory of Fluid Power and Mechatronic Systems, China under Grant No. GZKF-202003, and the China Postdoctoral Science Foundation (No. 2021M692065).
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Wang, X., Li, L., Huang, WW., Zhu, L. (2021). Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage. In: Liu, XJ., Nie, Z., Yu, J., Xie, F., Song, R. (eds) Intelligent Robotics and Applications. ICIRA 2021. Lecture Notes in Computer Science(), vol 13014. Springer, Cham. https://doi.org/10.1007/978-3-030-89098-8_31
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