Abstract
In this chapter we provide a brief overview of the instrumentation used for three key optical characterization methods: spectroscopic ellipsometry, Raman spectroscopy, and photoluminescence. We also discuss the relationship between the optical properties determined by each method and the data obtained by the measurement equipment.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
D.A. Aspnes, Spectroscopic ellipsometry—past, present, and future. Thin Sol. Films 571, 334–344 (2014)
E.A. Irene, A brief history and state of the art of ellipsometry, in Ellipsometry at the Nanoscale, ed. by M. Losurdo, K. Hingerl (Springer, Berlin, 2013), pp. 1–30
R.M.A. Azzam, The intertwined history of polarimetry and ellipsometry. Thin Sol. Films 519, 2584–2588 (2011)
H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, West Sussex, 2007)
R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light (North Holland, New York, 1989)
H.G. Tompkis, J.N. Hilfiker, Spectroscopic Ellipsometry, Practical Application to Thin Film Characterization (Momentum, New York, 2016)
B. Johs, J.A. Woollam, C.M. Herzinger, J.N. Hilfiker, R.A. Synowicki, C.L. Bungay, Overview of variable-angle spectroscopic ellipsometry (VASE): II, in Advanced applications, Proc. SPIE 10294, Optical Metrology: A Critical Review (1999), pp. 1029404
S.E. Green, C.M. Herzinger, B.D. Johs, J.A. Woollam, System and method for improving data acquisition capability in spectroscopic ellipsometers, US Patent 5757494 (1998)
G.E. Jellison, F.A. Modine, Two-modulator generalized ellipsometry: experiment and calibration. Appl. Opt. 36, 8184–8189 (1997)
G.E. Jellison, F.A. Modine, Two modulator generalized ellipsometer for complete Mueller matrix measurement, US patent 5956147 (1999)
J.A. Woollam Co., Inc., Guide to Using WVase32, 2010
S. Schöche, Private communication (2021)
V. Kanineni, Electron-Phonon Interactions and Quantum Confinement Effects on Optical Transitions in Nanoscale Silicon Films, Dissertation submitted to the University at Albany (2011)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2021 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Diebold, A., Hofmann, T. (2021). Instrumentation. In: Optical and Electrical Properties of Nanoscale Materials. Springer Series in Materials Science, vol 318. Springer, Cham. https://doi.org/10.1007/978-3-030-80323-0_3
Download citation
DOI: https://doi.org/10.1007/978-3-030-80323-0_3
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-80322-3
Online ISBN: 978-3-030-80323-0
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)