Abstract
Understanding the infrastructure for semiconductor device manufacturing provides important context for MEMS development. However, MEMS devices differ from other semiconductor devices, and these differences impact MEMS device development. This chapter discusses the semiconductor device manufacturing infrastructure and highlights ways MEMS device manufacture is both similar and different.
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Notes
- 1.
The highest volume fabs start over 100,000 wafers per month!
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Fitzgerald, A.M., White, C.D., Chung, C.C. (2021). Economics of Semiconductor Device Manufacturing and Impacts on MEMS Product Development. In: MEMS Product Development . Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-030-61709-7_2
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DOI: https://doi.org/10.1007/978-3-030-61709-7_2
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