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Structure and Properties of B4C Coatings Obtained by RF Sputtering with External Magnetic Field

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Nanomaterials and Nanocomposites, Nanostructure Surfaces, and Their Applications

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 246))

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Abstract

In this research, the method of synthesizing B4C coatings in Bulat-type device by using an RF plasma source with an external magnetic field is considered, which is based on the sputtering of the cathode material by high-energy argon ions when creating plasma in a weak magnetic field.

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Author information

Authors and Affiliations

  1. National Science Center “Kharkiv Institute of Physics and Technology” (NSC KIPT), Institute of Plasma Physics, Kharkiv, Ukraine

    A. V. Taran, I. E. Garkusha, V. S. Taran & R. M. Muratov

  2. National Technical University of Agriculture, Kharkiv, Ukraine

    I. E. Garkusha, T. S. Skoblo, O. I. Sidashenko, S. P. Romaniuk & T. V. Maltsev

  3. National Technical University “Kharkiv Polytechnic Institute”, Kharkiv, Ukraine

    I. E. Garkusha & A. A. Baturin

  4. V. N. Karazin Kharkiv National University, Kharkiv, Ukraine

    I. E. Garkusha

Authors
  1. A. V. Taran
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  2. I. E. Garkusha
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  3. V. S. Taran
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  4. R. M. Muratov
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  5. T. S. Skoblo
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  6. O. I. Sidashenko
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  7. S. P. Romaniuk
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  8. T. V. Maltsev
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  9. A. A. Baturin
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Corresponding authors

Correspondence to A. V. Taran or S. P. Romaniuk .

Editor information

Editors and Affiliations

  1. National Academy of Sciences of Ukraine, Institute of Physics, Kyiv, Ukraine

    Olena Fesenko

  2. National Academy of Sciences of Ukraine, Institute of Physics, Kyiv, Ukraine

    Leonid Yatsenko

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Taran, A.V. et al. (2021). Structure and Properties of B4C Coatings Obtained by RF Sputtering with External Magnetic Field. In: Fesenko, O., Yatsenko, L. (eds) Nanomaterials and Nanocomposites, Nanostructure Surfaces, and Their Applications . Springer Proceedings in Physics, vol 246. Springer, Cham. https://doi.org/10.1007/978-3-030-51905-6_5

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