Abstract
The chapter presents a comprehensive analysis of the nanoindentation derived mechanical characteristics (elastic modulus and indentation hardness) of the TiN coating deposited using the method combining magnetron sputtering and arc evaporation on a steel substrate. For the nanoindentation experiments, spherical indenter was used. The results of studies of microstructure, chemical composition, and also measurements of the coating thickness using a focused ion beam on a scanning electron microscope are presented.
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Acknowledgements
This research was supported by RFBR grants Nos. 18-07-01397-a, 18-07-01177-a, and 18-57-00015 Bel_a. Experiments on nanoindentation, SEM and AFM were conducted in the Nanocenter of the Research and Education Center “Materials” (http://nano.donstu.ru/). E. V. Sadyrin was supported by the scholarship of the President of the Russian Federation No. SP-3672.2018.1.
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Sadyrin, E. et al. (2020). Mechanical Properties Derived by Spherical Indentation of TiN Coating Deposited by a Method Combining Magnetron Sputtering and Arc Evaporation. In: Parinov, I., Chang, SH., Long, B. (eds) Advanced Materials. Springer Proceedings in Materials, vol 6. Springer, Cham. https://doi.org/10.1007/978-3-030-45120-2_8
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