Abstract
Often, when you do X-ray microanalysis of thin foils, you are seeking information that is close to the limits of spatial resolution. Before you carry out any such microanalysis you need to understand the various controlling factors, which we explain in this chapter. Minimizing your specimen thickness is perhaps the most critical aspect of obtaining the best spatial resolution, so we summarize the various ways you can measure your foil thickness at the analysis point.
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© 1996 Springer Science+Business Media New York
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Williams, D.B., Carter, C.B. (1996). Spatial Resolution and Minimum Detectability. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2519-3_36
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DOI: https://doi.org/10.1007/978-1-4757-2519-3_36
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